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Application of The MDS-OVL Vertical Overlay System
. It was then lowered by rope to the work area, 60' below. Previous discussions expressed the importance of precision installation. The horizontal rail rings must be installed perfectly level and the vertical rails plumb so the eight individual overlay patterns would align with each other. First to be installed
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MICRO: Prod Tech News
wafer handling for wafers as large as 300 mm and automated template-loading capability. The system has a novel in-liquid alignment and magnification control system for performing precision overlay in advanced lithography applications. Spin Track System. SITE Services. Santa Clara, CA. The Tractrix
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MICRO: Products
the assemblies suitable for sealed systems and washdown environments. Available in lengths up to 12 ft, the assemblies can be custom molded and machined. Their screw-and-nut combination includes a precision-rolled stainless-steel lead screw and a high-strength, self-lubricating polymer nut. Mask Repair
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Optical Comparators in Medical Device Manufacturing
New England Precision Grinding (NEPG) of Holliston, MA produces micro-ground wire from 304 stainless steel and super-elastic nitinol to meet the precise demands of medical devices. Established in 1987, NEPG has developed a proprietary centerless grinding process for ever-smaller devices to meet
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MICRO: Product Technology News (June '2000)
sites/wafer, while real-time measurement analysis provides rapid process feedback. Its proprietary optics and advanced measurement algorithms optimize measurement integrity and precision. Measurement data are accessible via network connections, and user-defined recipes are fully transferable
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MICRO: 2004 Greatest Hits
and robotics, including a dual-arm robot, a high-precision stage, and high-speed focus system. It provides robust pattern recognition, fine thickness reproducibility, and high throughput. The Liquozon Single ozonated-water (DIO water) delivery system is the newest in a series of ultrapure ozonated
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MICRO: Prod Tech news
combination of spectroscopic reflectometer, spectroscopic ellipsometer, optical critical dimension, diffraction-based overlay, and wafer stress/bow modules. The tool features temperature control and robotics, including a dual-arm robot, a high-precision stage, and high-speed focus system. It provides
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MICRO: Greatest Hits of 2005
and automated template-loading capability. The system has a novel in-liquid alignment and magnification control system for performing precision overlay in advanced lithography applications. In-Line Chemical Metrology System. Metara. Sunnyvale, CA. The Sentry platform is a production-worthy in-line chemical