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What is a Resistance Temperature Detector (RTD)?
to measure temperature by correlating the resistance of the RTD element with temperature. Most RTD elements consist of a length of fine coiled wire wrapped around a ceramic or glass core. The element is usually quite fragile, so it is often placed inside a sheathed probe to protect it. The RTD element...
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Fast Response Optical Sensors Prove Invaluable in Demanding Gaging Applications
. Sensor operation. Each MTI-2100 Fotonic probe contains a set of light transmit and receive fibers, which can be arranged in three different configurations (random, hemispherical or concentric as shown in Figure 1). A tungsten halogen lamp feeds light down the transmit fibers, where it exits...
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MICRO:May 98:Product Technology News
plasma parameters. The system enables accurate identification of process changes, including plasma potential, ion densities, electron densities, and electron temperature. The small probe tip design and efficient RF compensation ensures that spatially resolved measurements can be obtained with minimal...
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MICRO: BEOL Equipment
the final film thickness is reached. These sequential self-saturated surface reactions lead to tightly controlled, layer-by-layer growth of the films. ALD in general offers other interesting properties, such as the ability to deposit high-quality conductive films at low temperature, excellent step...
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Monitoring slurry stability to reduce process variability
for on-line monitoring is due in part to clogging of the porous probe membrane by small abrasive particles and in part to the amount of calibration and maintenance required. Since pH is dependent on temperature, pH readings also must be temperature compensated. Significant changes in pH can reduce...
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MICRO: Product Technology News (September 2000)
a balanced-mass high-speed stage to eliminate stage-induced system vibration and improve focus and image contrast. System features that minimize sensitivity to such environmental challenges as temperature variations make imaging of sub-100-nm design rules possible. Ultimate 300-mm-wafer throughput...
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MICRO:Top 40 (Nov '00)
. The precision controller produces no overshoot or oscillation. Temperature Probes. Mastco. North Brunswick, NJ. Probes with ultra-high-purity PTFE bodies are sufficiently durable for measuring the temperatures of corrosive and aggressive chemicals in numerous applications. Each probe body...
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MICRO:Top 40 (Nov '00)
produces no overshoot or oscillation. Temperature Probes. Mastco. North Brunswick, NJ. Probes with ultra-high-purity PTFE bodies are sufficiently durable for measuring the temperatures of corrosive and aggressive chemicals in numerous applications. Each probe body is isostatically molded...
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MICRO:Product Technology News (July '99)
photoresist removal. This option provides closed-loop temperature control that can speed process steps for increased throughput. (Semicon West, San Francisco, South Hall, Booth 1316) Designed for low-k dielectric and CVD processes, Mag-Lev compound molecular pumps use optimal hydrogen and argon pumping speeds...
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Structure-Property Relationships in Conventional and Nanocrystalline NiTi Intermetallic Alloy Wire (.pdf)
as a function of grain size. at a nominal thickness of 1000 nm. (c) Foil lift out using a 2-lm. followed a path expected from the classic Hall-Petch relation-. tungsten probe. (d) After attachment to a SEM grid post, sample is. thinned at reduced ion current to a thickness of about 100 nm or less...