Products & ServicesSee also:
Supplier: Nor-Cal Products, Inc.
Description: Nor-Cal Products Deposition Monitors are used to measure the thin film (deposition) thicknesses, rate of deposition or frequency, in conjunction with the crystal sensor. Models are available which independently monitor 2 or 6 crystals. Included Windows software allows the user to change the monitor
- Form Factor: Monitor / Instrument
- Mounting / Loading: Floor Mounted / Stand-alone
- Applications: CVD / PVD Films
- Measurement Capability: Deposition Rate, Thickness - Film / Layer
Supplier: Nor-Cal Products, Inc.
Description: Crystal Sensors are available in single and dual crystal versions. Typically single crystal sensors are used for short runs, with dual crystal sensors being used for longer runs. Dual crystal sensors operate with a pneumatically actuated shutter; only one crystal is used at a time. Both versions are
- Form Factor: Sensor / Sensing Element
- Technology: Crystal Microbalance (QCM)
Supplier: ULVAC Technologies, Inc.
Description: No Description Provided
- Form Factor: Monitor / Instrument, Controller
- Mounting / Loading: In-situ / System Mounted
- Applications: Semiconductor Wafers, CVD / PVD Films, Flat Panel Displays, Optical Components
- Measurement Capability: Deposition Rate, Endpoint Detection / Plasma Diagnostics, Thickness - Film / Layer
Description: MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top
- Form Factor: Wafer Probing System, Sensor / Sensing Element
- Mounting / Loading: In-situ / System Mounted, Floor Mounted / Stand-alone
- Applications: CVD / PVD Films, Polymers / Photoresists, Other
- Measurement Capability: Deposition Rate, Endpoint Detection / Plasma Diagnostics, Thickness - Film / Layer, Other
Find Suppliers by Category Top
Conduct Research Top
Beta testing an in-line monitor for moisture measurement in inert gas lines
was described in an earlier issue of Designed to measure moisture levels in ultra-high-purity (UHP) nitrogen and argon gases, the monitor uses a piezoelectric quartz crystal microbalance (QCM) sensor. The quartz crystal is coated with a thin film of barium metal, with which moisture reacts irreversibly
More Information Top
Assessment of energy dissipation mechanisms for AT-cut QCM sensors with high frequency impedance analysis and optimization heuristics
4.1 Stress in QCM thin film electrode metallizations .
Dense Nanoparticulate Thin Films via Gold Nanoparticle Self‐Assembly
Hence, to a first approximation, the QCM thin film data can be used as an indication of the relative amount of gold nanoparticles deposited on colloid substrates used in similar preparations (see earlier).
The selectivity of quartz crystal microbalance gas sensor coated with TiO2-porphyrin nanocomposite thin films towards volatile organic compounds
The QCM sensors are fabricated by coating the QCM with thin films that are sensitive to the present of gases.
Principles of Bacterial Detection: Biosensors, Recognition Receptors and Microsystems
CQCM, TQCM, Mark 21 QCM Thin - film controllers Tectra .
GaPO4 high temperature crystal microbalance demonstration up to 720°C
Figure 4 shows the measured values of R1 of the GCM and the QCM during thin film deposition.
Diamond: a material for acoustic devices
identical to QCM , thin film bulk acoustic resonators (FBAR) consist of a piezoelectric thin film (ZnO, AlN) deposited by PVD and/or CVD techniques and sandwiched between two metallic electrodes (see Fig. 3).
Physics and Applications of CVD Diamond
Basically identical to QCM , thin film bulk acoustic resonators (FBAR) consist of a thin (from 100 nm to few micrometers) piezoelectric thin film (ZnO, AlN) deposited by physical vapor deposition (PVD) and/or chemical vapor deposition (CVD) techniques and sandwiched between two metallic…
Controlled Degradability of Polysaccharide Multilayer Films In Vitro and In Vivo
For QCM , thin films made of six layer pairs were built and then placed in contact with the solutions, in order to follow the sig- nal over a long time period.
Thermal Desorption of Water-Ice in the Interstellar Medium
The QMS is used for tempera- ture programmed desorption (TPD) experiments (see §2.2), the FTIR for reflection-absorption infrared spec- troscopy (RAIRS), and the QCM for thin film mass determination.
International Space Station Utilization Conference and Exhibit > Materials Exposure and Degradation Experiment (MEDET)
Atomic oxygen fluxes will be estimated by other QCM and thin film sensors.