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  • MICRO: 'Round the Circuit
    the resolution to 65 nm for traditional lithography at the 193-nm wavelength. The technique also holds the potential to achieve 45-nm resolution at the 157-nm wavelength. One key to the successful use of the technique is a favorable refractive index. NIST points out that the refractive index of water
  • MICRO: The Hot Button
    node and below will be for patterned layers (CD, overlay, layer thickness, macrodefects), gate oxides (thickness, uniformity, nitrogen content), metal layers (filling quality, grain size, boundaries), and low-k materials (thickness, refractive index, porosity, composition, uniformity). Although
  • The Best of Pittcon 2007
    Operational Excellence & Lean Six Sigma ), which introduced titration and materials characterization products, measurement instruments and microbalances. Of particular interest was the new LiQC (for liquid quality control) system for simultaneous determination of density, refractive index, pH

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