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  • A New Technique for Residual Gas Estimation and Modeling in Engines (.pdf)
    This paper addresses the longstanding problems of residual gas measurement during engine dynamometer testing, and of real-time residual modeling for engine control applications. A new method is described which is simple to apply, requiring only currently standard calibration test cell
  • Mass Spectroscopy of Metastable Atomic Species in Gas Analysis and Processing Plasmas at High Spectrometer Source Pressures
    The availability of particle counters which may be operated at ambient pressures of up to 2x10-4 Torr is highly desirable in many current research. applications. In one field in particular, it allows mass spectroscopy of gas analysis and processing plasmas to be performed using pressures
  • Outgassing Species in Optoelectronic Packages
    accepted method for evaluating internal gas content is Residual Gas Analysis (RGA) via mass spectrometry.
  • Interpretation of RGA Data
    Residual Gas Analysis of hermetic microelectronic devices has traditionally been treated as a means of measuring a device's internal moisture content only. Too many times, the moisture reading is treated on a pass/fail basis using the MIL/STD criteria that all devices must contain less than 5,000
  • PAT Advances Freeze Dryer Control
    Gas Composition Provides Process Clues PAT techniques based on real-time analysis of lyophilizer gas composition also are being developed, Trappler says. Currently, the two most useful appear to be residual gas analysis (RGA) based on mass spectrometry and infrared (IR) spectrometry. There are some
  • MICRO:April 98:Product Technology News
    at millitorr pressure. On-line process monitoring, control, purity verification, and residual gas analysis can be performed in real time using a Windows-based program. Mass range is 3/4300 amu. The analyzers are programmable and also feature multiple-head operation. The FPA-3000EX5 resolves 0.22- um features
  • STEM System
    in the millisecond range. The unit offers high particle-removal efficiency with low film loss at the 65-nm node and beyond. TOOLweb RGA, a sensor automation platform for residual gas analysis (RGA) control and communication, monitors process integrity and tool performance in real time, identifying process excursions
  • MICRO: Taking Control
    -copper metal deposition chambers, a preclean chamber, and two degas chambers. Each of these chambers had active residual gas analysis (RGA) sensors, and the preclean chamber also had a particle monitor. After performing a series of wafer runs to characterize the system, the engineers had a picture

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