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  • MICRO: Products In Action
    properties of PFPE coolants do not break down, thus eliminating the need for expensive resistivity monitors and filtration systems that often have been required for other coolants, such as ethylene glycol, glycol/ deionized-water mixtures, and Freon. PFPE fluids are known for being clean and inert and having
  • MICRO: Critical Material-Wafers
    a broad range of devices compared with current metrology techniques, without any wafer damage or contamination. The project described in this article evaluated the Epimet Model 2 noncontact resistivity monitor from SemiTest (Billerica, MA) for its suitability to monitor epi wafer production
  • Interphex 2006 Preview: The Best of the Phex
    applications to meet USP standards. Over 30 years ago, Thornton pioneered conductivity and resistivity instrumentation with computed high-purity temperature compensation for the semiconductor industry before similar instruments became available for pharmaceutical applications. Today, many pharmaceutical

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