Rotary Micro Pump

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• Transferring and Metering Liquids with High-Speed Diaphragm Pumps
  an extensive range of products for applications ranging from analysis to water treatment. Types of pump. For transferring and metering relatively small quantities of liquid, oscillating or rotary positive-displacement pumps are generally employed. The following types are oscillating positive-displacement...
• Improve Your Medical Pump Performance With Hybrid Stepper Motors (.pdf)
  often offer a. far simpler, lower cost and maintenance free. alternative. Hybrid steppers are generally made with precise machined. There are three types of rotary step motors: canned stack,. parts and offer finer resolutions (usually 1.8o or 0.9o step. VR (variable reluctance) and hybrid step...
• MICRO: Products
  and velocity control for disk-drive, imaging, and wafer-inspection applications. Balanced to ISO 1940 G 0.4 tolerances, the spindles use labyrinth-type sealing to minimize particle migration, making them suitable for Class 1 cleanroom operations. An integral rotary union is provided for a vacuum supply...
• MICRO: Products
  under a variety of temperature and humidity conditions. Piezoelectric Motors. Nanomotion. Ronkonkoma, NY. HR-series piezoelectric motors can drive both linear and rotary stages. They have a dynamic speed range from several microns per second to 250 mm/sec and can be mounted to traditional low-friction...
• MICRO: Product Extra!
  , including equipment for producing, controlling, and measuring vacuum. The four-color, hardcover catalog contains information on each product's applications, features, technical data, and part numbers. It also includes accessories and components. Products include turbomolecular, rotary vane, Roots...
• MICRO: Product Technology News
  chemical-mechanical polishing (CMP) pads to granite or stainless-steel platens. The permanent adhesive surface, which bonds aggressively to the polishing pad, typically generates fiber-tearing bonds when rotary lamination, pressure, and heat assistance are applied. The reverse side of the tape contains...
• MICRO: Prod Tech news
  to add optional plug-in process enhancements. Helium Leak Detector. Ulvac. Methuen, MA. Heliot 700 helium leak detectors are offered in four models: an internal rotary-vane pump system, a dry diaphragm system, a large external rotary-vane pump system, and a dry scroll-pump system. The detectors feature...
• MICRO: Product Technology News (September 2000)
  and future wafer-diagnostic requirements in both R&D and manufacturing environments. Feedthrough Actuator. Harmonic Drive Technologies. Peabody, MA. A combination rotary feedthrough and harmonic-drive servo actuator that supplies high-powered, precisely controlled motion within a vacuum chamber...
• MICRO: Archive: Back Issue TOC
  , ultrathin wafer backgrinding, gas-cluster ion-beam system, single-wafer electroplater, 3-D surface analysis instrument, lithography filter system, CMP platform, sputtering system, optical digital profilometry system, moisture analyzers, rotary actuator, excimer laser, TOC analyzers, thin-film measurement...
• MICRO: Industry News: Expansions and Acquisitions (June 2000)
  ability to repair and service its line of turbo, rotary vane, dry, and diaphragm pumps. The company will also repair and service instruments such as quadrupole mass spectrometers and helium leak detectors. The upgraded support center is located in a building formerly owned by Semivac, which Pfeiffer...

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