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  • Surface Finish Measurement Basics - Roughness Is An Important Characteristic of Machined Surfaces
    The growing influence of surface. finish can be traced to dramatic changes. in manufacturing specifications and. drastic tightening of dimensional tolerances. over the past few decades. As a. result of these changes, the proportion. of the tolerance range, which is taken up. by surface
  • Surface Texture Parameters
    roughness and waviness data. Proper selection of the correct filter cutoff in software is critical to measurement accuracy. Evaluation Length- The area from which data is obtained. It is a three dimensional area that corresponds to the instrument field of view, or a two dimensional profile
  • SmartMoves TM Spotlights: Veeco Instruments, Inc. (.pdf)
    roughness and topography, with subnanometer resolution. The measurements are accurate, repeatable and high speed. Veeco chose Galil's Ethernet-based DMC-3425 motion controllers for its profilers because they provide a highly versatile and powerful form of distributed control where many controllers can
  • Improved Interferometric Optical Testing
    Interferometry is used for testing optical components and optical systems as well as the metrology of many other components, such as the flatness and roughness of hard disk drive platters and the shape of magnetic recording heads and machined parts. This article describes three recent advances
  • MICRO: Spotlight
    PTFE wetted surfaces and encapsulated electronics. By delivering simultaneous pressure and flow measurements, the unit enables users to monitor process parameters and set alarms. (S.F., North Hall, Booth 5944A) The VCA-3000 contact-angle analyzer from incorporates computerized video imaging
  • 3D Atomic Force Microscopy as an Alternative to X-SEM and TEM for Advanced Process Metrology (AN91) (.pdf)
    development due to development costs up, process the long turnaround times. developers seek new metrology Whereas the available error budget solutions to better address today's of TEM is consumed by LWR and line stringent process requirements. edge roughness (LER), the X3D atomic Traditional
  • MICRO:Product Technology News (April '99)
    accommodates both 200- and 300-mm wafers and can be upgraded to measure critical dimensions on sub-0.13- um geometries. The system's process variation monitoring technology uses a column design and special algorithms to measure line edge roughness, line edge width variation, and open or closed
  • MICRO:Product News
    . The CS-5000 is a combination instrument for the analysis of precision forms and surface roughness parameters. An automatic temperature compensation function adjusts measured data to the reference temperature. LaserHologage measuring technology provides a resolution of 2.0 nm. Geometric analysis commands

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