Semi Fab Measuring Instrument

Conduct Research

• MICRO: Technical Viewpoint - Medearis (June 2000)
  Vibration. The word is almost a mantra that sometimes is used to scare facility owners into justifying additional funding to "fix" or "prevent" vibration-related issues in any project, be it a tool installation, a fab retrofit, or the construction of a new facility. Few people in the construction...
• MICRO: Industry News: Lead Story (June2000)
  the analogy to draw attention to an important new set of SEMI standards on equipment voltage. Fab management often doesn't pay much attention to its power supply until glitches occur, explains Malhoit. And, as any process or facilities engineer will tell you, such sags in voltage occur regularly...
• MICRO: Semicon West Technical Program (June 2002)
  understanding of concepts and applications. With computer workstations, this lab-style workshop allows the participants hands-on experience in measuring. COO sensitivities and examining their own equipment, materials, or fab conditions. SEMI Technology Symposium (STS): Innovations in Semiconductor...
• MICRO: Product Tech News
  plates. Based on the GAMA automated wet-clean system, the tool has been optimized to aid both reticle manufacturing and meet the fast-turn needs of fab reticle cleaning. In the area of reticle manufacturing, it can be used for complete photoresist strip, postash residue removal, preclean after-strip...
• SEMICON EUROPA EXHIBITOR LIST
  Pressure Sensors Active Sensor, Tronics; IT/Peripherals Silmag, Baltea HP THURSDAY, APRIL 2 Equipment and Materials Market Briefing 8:30 9:30 a.m. Elizabeth Schumann of SEMI's market statistics department will present a status report. 300 mm The Fab Challenge 2000: A Forum on Actual...
• MICRO:
  away to cope with region's ongoing power pinch European chip equipment initiative succeeds in putting region's toolmakers on world map Motorola invests more in China; Cymer opens center in Hsinchu; Philips expands in Shanghai Tower chooses M+W Zander to build Israeli fab LGInternational signs ITS...
• MICRO:Top 30 (November/December 2001)
  The fully automated Expida dual-beam structural diagnostics tool performs in-fab characterization and analysis of process excursions and defects. The instrument can be reconfigured from 200- to 300-mm wafer manufacturing with minimal interruption. The tool allows users to cut, view, measure...
• MICRO:Semicon Southwest '98 (Oct. '98, p.127)
  With last-minute help from the local fire marshals, SEMI has squeezed all exhibitors for Semicon Southwest 98 into the Austin Convention Center. More than 800 booths featuring over 630 semiconductor equipment and materials companies are expected to fill the reconfigured halls at this year's show...
• MICRO: Critical Materials?Chemicals
  . Choosing the Right Flowmeter for Fab Solvent Hoods. The solvent hoods at DMOS5-S had originally been outfitted with sightglass-type flowmeters with no electronic flow measurement or SEMI equipment communication standard (SECS) alarm capability. (SECS is a computer-to-computer communications protocol...
• MICRO:Top 25 (November/December 2002)
  values includes 100, 200, 400, 800, and 1000 nm. The product is available in wafer sizes of 300, 200, and 150 mm. A large calibration area of 800 X 800 um extends product lifetime, since the user is not limited to measuring in the same spot continuously. Boron Analyzer. Ionics Instruments. Boulder, CO...

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