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Semi Inspection Equipment

 

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Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.  
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Conduct Research Top

  • Semi mfg equipment shipments hit $11.2 billion
    The figure is 10.9% above the same quarter a year ago and 12.7% below that for the fourth quarter of 2000 Semiconductor Equipment and Materials International (SEMI), the association of companies that supply manufacturing technology and materials to chipmakers, says worldwide semiconductor
  • MICRO:Defect Inspection Equipment, by Thomas Reuter (Oct '99)
    low-angle laser illumination and dark-field collection optics. While drawing on the design of its predecessor, the new inspection tool offers enhanced sensitivity and throughput. Developed to meet the inspection requirements of 0.18-um design rules and. MICRO:Defect Inspection Equipment, by Thomas
  • Lubricants for Semiconductor Manufacturing Equipment (.pdf)
    . homogeneous that their natural counterparts. Specific synthet-. automated assembly equipment the norm in semi-. ic oils offer additional advantages, which are discussed below. W conductor manufacturing, they also have posed a Typically, oils are specified for flea-powered devices, where. conundrum regarding
  • Lubricants For Semiconductor Manufacturing Equipment
    for semi-conductor manufacturing. No surprise that robots, pick and place stations, conveyors, and other devices on the production line run better when lubricated. But oils and greases contribute to airborne molec- Automated assembly methods have created a conundrum for semi-conductor manufacturing. No surprise
  • MICRO: Critical Material
    metals and alloys. SEMI F81-1103, Specification for the Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications. This standard provides visual inspection and acceptance criteria for welds of stainless steel and other
  • MICRO: 'Round the Circuit
    of May 22. In addition to the conference lineup, two SEMI standards seminars on equipment data acquisition (Interface-A) and SECS/GEM/ GEM300 factory automation immediately follow the conclusion of the main event on May 24-25. For more information on ASMC 2006, check www.semi.org/asmc. TSMC readies
  • MICRO:'Round The Circuit
    009;SEMI and NIST are backing a program to develop a framework that will allow chipmakers and suppliers to electronically exchange information without divulging company secrets. Led by SEMI, the joint venture taps funds from NIST's Advanced Technology Program to create a so-called flexible firewall
  • MICRO:Semicon Southwest p.2 (Oct '99)
    Satisfaction . . . without Stress Instructor: Cole Baker, The CompoGroup (continues on Monday, October 18, same hours) Instructor: Harry Levinson, DUV Lithography Development STEP: SEMI E79, Standard for the Definition and Measurement of Equipment Productivity Chair: Jim Irwin, Irwin Consulting

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