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Semi Measuring Equipment

 

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Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.  
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  • Measuring Machining Imperfections and Runout in Automobile Wheel Spindles
    unnecessary parts rejection and scrap. Application Notes: Non-contact Measurement Sensors, Solutions and Systems - MTI Instruments.   . Measuring Machining Imperfections and Runout in Automobile Wheel Spindles. Introduction. A cylindrical grinding process finishes most wheel spindle surfaces
  • Lubricants for Semiconductor Manufacturing Equipment (.pdf)
    . homogeneous that their natural counterparts. Specific synthet-. automated assembly equipment the norm in semi-. ic oils offer additional advantages, which are discussed below. W conductor manufacturing, they also have posed a Typically, oils are specified for flea-powered devices, where. conundrum regarding
  • Measuring trace ionic impurities in ultrapure acids and bases with ion chromatography (Third in a series)
    ManLi Wu and Jian-Ge Chen, Impurities in reagents used in semi conductor device production can adsorb on the surfaces of devices and thus affect their reliability. The continuing increase in the sophistication and scale of integrated circuits has driven the need for monitoring trace levels of ionic
  • Developing an exit charge specification for semiconductor production equipment
    , "IEC 801: The Transient Immunity Standard Defined," in Interference Technology Engineer's Master, West Conshohocken, PA, Robar Industries, 1995. 10. Recommended Practice for Measuring Static Charge on Objects and Surfaces SEMI Standard E43-95, Mountain View, CA, SEMI, 1995. 11. Cooper DW, Miller
  • Lubricants For Semiconductor Manufacturing Equipment
    for semi-conductor manufacturing. No surprise that robots, pick and place stations, conveyors, and other devices on the production line run better when lubricated. But oils and greases contribute to airborne molec- Automated assembly methods have created a conundrum for semi-conductor manufacturing. No surprise
  • MICRO: Semicon West Technical Program (June 2002)
    understanding of concepts and applications. With computer workstations, this lab-style workshop allows the participants hands-on experience in measuring. COO sensitivities and examining their own equipment, materials, or fab conditions. SEMI Technology Symposium (STS): Innovations in Semiconductor
  • MICRO:Semicon Southwest '98 (Oct. '98, p.127)
    With last-minute help from the local fire marshals, SEMI has squeezed all exhibitors for Semicon Southwest 98 into the Austin Convention Center. More than 800 booths featuring over 630 semiconductor equipment and materials companies are expected to fill the reconfigured halls at this year's show
  • Determining critical trace elements in high-purity phosphoric acid
    ., of Perkin Elmer, Wilton, CT. References 1. Book of SEMI Standards (BOSS), Mountain View, CA, Semiconductor Equipment and Materials International, 1996. 2. Jacksier T, Gluodenis TJ Jr., and Thomas RJ, "Determining Critical Trace Elements in High-Purity Hydrochloric Acid by ICP-MS Alone," MICRO, 14(3):63

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