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MICRO: Archive: Back Issue TOC
, integrated metrology tool, cleanroom-compatible filters, liquid optical particle counter, storage system/stocker, extractive gas monitor, ESD monitoring system, machine control system, mechanical vacuum pump, field emission SEMs, continuous gas-emission monitor Vendor releases new version of wafer-mapping
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MICRO: Semicon West Technical Program (June 2002)
with this new standard as well as its associated testing standard, SEMI F42. Hands-on experience by test houses, subsystem suppliers, tool manufacturers, and semiconductor fabs is presented. European Union EHS Policy Briefing This briefing offers an overview of new and drafted legislation and regulations
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MICRO: The 300-mm Imperative - Griessing (July 2000)
and maintenance, such as chemical and bath exchanges, and sputtering target exchange. Tool-monitoring test wafers are used for quality checks and trend monitoring of process steps. Metrology reference wafers are required by metrology tools for periodic calibration and by process tools if in situ measurements
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MICRO: Product Tech News
supply, it meets Class 1 cleanroom standards and complies with all SEMI and safety standards. The SIS300 sorter uses a patented transfer technology, providing embedded wafer alignment and ID read with vacuum-free edge contact. (Semicon Japan). Extractive Gas Monitor. PureAire Monitoring Systems
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MICRO:Semicon Southwest p.2 (Oct '99)
Economics of Equipment Productivity from the Equipment Supplier View A User's View of Equipment Productivity Improvement as a Strategic Advantage to the Equipment Manufacturer In Pursuit of Efficiency (Integrating SEMI E10, SEMI E58, and SEMI E79 to Optimize Equipment Performance) Tool Availability, MTBF
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MICRO: Products
assure easy installation, and job-specific approval drawings speed project cycle times. A four-position selector switch simplifies monitoring and control capabilities. Pumping and Abatement Unit. Alcatel Vacuum Technology. Annecy, France. The Alcatel Tool Pumping Solution (ATPS), a small-footprint
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MICRO:Industry News:Expansions & Acquisitions (Sept. '98, p.26)
Client demand was the main reason that Olin Microelectronic Materials and Matheson Semi-Gas Systems signed their recent deal to combine their respective chemical and gas management services in one package. "Customers [told us] they were looking for one company to offer both gases and chemicals
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MICRO:Archives of 1998 Issues
at Tower Semi. Process Equipment Tool Packaging: Developing clean-film specifications that include outgassing hydrocarbons and leachable ion species can facilitate the selection of contamination-free packaging. PRODUCT TECHNOLOGY NEWS Products: Nitrogen-purged microenvironment, CMP slurry