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Semiconductor Inspection System

 

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Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.  
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  • Description: One of Nikon's most advanced and versatile semiconductor inspection systems, the Optistation 3200 provides three-mode macro inspection capability - front, backside center, and backside perimeter - as well as high performance lighting techniques that allow for detection of a wide variety of process
    • Form Factor: Wafer Probing System
    • Mounting / Loading: Floor Mounted / Stand-alone
    • Applications: Semiconductor Wafers
    • Measurement Capability: Defects / ADC
  • Supplier: GPAllied
    Description: GPAllied's solutions are about you: the client. Condition Monitoring solutions customized for you and your challenges, coaching and training solutions that address the needs of your people and operations consulting solutions tailored for your reliability process. Without a thorough understanding
    • Capabilities: Consulting / Training, Evaluation, Failure Analysis / Troubleshooting, In-process / In-line Testing
    • Forms Inspected: Facilities / Capital Equipment, Quality / Management Systems, Services
    • Services Offered: Condition Monitoring, Color / Appearance, Dimensional Gaging / Metrology, Electromagnetic / EMC, Leak / Seal Testing, Mechanical / Structural (Statics), NDT / Inspection, Safety / Liability, Thermal Imaging / Thermography, Visual / Video Inspection
    • Industry Applications: Appliances, Aerospace / Avionics, Automotive, Coatings / Paint, Drugs / Pharmaceuticals, Electrical Distribution, Food & Beverage, Hydraulics / Pneumatics, Industrial / Machinery, Marine, Materials, Piping / Pressure Vessels, RF & Wireless / IT & Telecom, Microelectronics / Electronics, Semiconductor / IC Packages, Welding & Fabrication
  • Supplier: Cognex Corp.
    Description: Cognex’s BGA II Inspection Package provides a GUI and vision tool for inspecting BFA, CSP, and flip-chip devices. BGA II checks for missing, misplaced, or improperly formed solder balls. This package offers provides robust and high speed inspection despite wide variations in device appearance
    • System Type: Modular / PC-Based
    • Applications / Capabilities: Edge Detection, Electronics or Semiconductor Inspection, Flaw Detection, Other
    • Image Source: Area Scan Camera, Line Scan Camera, High Speed / Brightness
  • Description: The P-770 is a low-profile, highly accurate, XY scanning and positioning system, providing a positioning and scanning range of 200 x 200 µm with better than 10 nm resolution. The P-770 was specially designed for semiconductor inspection systems. The 200 x 200 mm clear aperture is ideal
  • Description: MSI Viking Gage provides our customers with complete Dimensional Precision Measurement and Metallurgical Contract Inspection services. We operate as one of the largest industry-dedicated labs in North America with the most advanced and highest precision inspection capabilites available. We can
    • Capabilities: Auditing / Assessment, Certification, Consulting / Training, Evaluation, Failure Analysis / Troubleshooting, Field Evaluation / On-site Inspection, First Article / Contract QA, Fixtures / Equipment, In-process / In-line Testing, Specialty / Other
    • Forms Inspected: Components / Parts, Products, Facilities / Capital Equipment, Quality / Management Systems, Samples, Services
    • Services Offered: Dimensional Gaging / Metrology, Electrical / Electronic Testing, Flow / Pressure Testing, Leak / Seal Testing, Mechanical / Structural (Statics), NDT / Inspection, Reliability / Robustness, Visual / Video Inspection, Specialty / Other
    • Industry Applications: Appliances, Aerospace / Avionics, Automotive, Building & Construction, Coatings / Paint, Drugs / Pharmaceuticals, Electrical Distribution, Food & Beverage, Health Care / Medical, HVAC, Plumbing and Lighting, Hydraulics / Pneumatics, Industrial / Machinery, Instrument & Sensors / Laboratory, Marine, Materials, Piping / Pressure Vessels, RF & Wireless / IT & Telecom, Microelectronics / Electronics, Semiconductor / IC Packages, Welding & Fabrication, Specialty / Other
  • Description: TÜVRheinland® delivers premier independent testing, assessment, and certification services to help companies gain access into global markets. Boasting an international network across six continents, the company's in-country experts ease the path to compliance with cost-effective pricing and quick
    • Capabilities: Auditing / Assessment, Certification, Consulting / Training, Evaluation, Failure Analysis / Troubleshooting, Field Evaluation / On-site Inspection, First Article / Contract QA, Fixtures / Equipment, In-process / In-line Testing, Research and Development, Specialty / Other
    • Forms Inspected: Components / Parts, Products, Facilities / Capital Equipment, Quality / Management Systems, Samples, Services
    • Services Offered: Condition Monitoring, Color / Appearance, Corrosion, Dimensional Gaging / Metrology, Electrical / Electronic Testing, Electromagnetic / EMC, Leak / Seal Testing, Mechanical / Structural (Statics), NDT / Inspection, Reliability / Robustness, Safety / Liability, Thermal Imaging / Thermography, Visual / Video Inspection, Specialty / Other
    • Industry Applications: Appliances, Aerospace / Avionics, Automotive, Building & Construction, Coatings / Paint, Drugs / Pharmaceuticals, Electrical Distribution, Food & Beverage, Health Care / Medical, HVAC, Plumbing and Lighting, Industrial / Machinery, Instrument & Sensors / Laboratory, Marine, Materials, Piping / Pressure Vessels, RF & Wireless / IT & Telecom, Microelectronics / Electronics, Semiconductor / IC Packages, Welding & Fabrication
  • Description: The Snell Group is the world's leading expert on using Infrared Thermography (IR) and Electric Motor Testing (EMT) to reduce risk, increase uptime, save money, conserve energy, and improve safety. They offer training, certification, inspection, and consulting services for IR and EMT professionals
    • Capabilities: Auditing / Assessment, Certification, Consulting / Training, Evaluation, Failure Analysis / Troubleshooting, Field Evaluation / On-site Inspection, Fixtures / Equipment, In-process / In-line Testing, Research and Development
    • Forms Inspected: Components / Parts, Products, Facilities / Capital Equipment, Quality / Management Systems, Samples, Services
    • Services Offered: Condition Monitoring, Electrical / Electronic Testing, Flow / Pressure Testing, Leak / Seal Testing, Mechanical / Structural (Statics), NDT / Inspection, Reliability / Robustness, Thermal Imaging / Thermography, Visual / Video Inspection
    • Industry Applications: Appliances, Aerospace / Avionics, Automotive, Building & Construction, Coatings / Paint, Drugs / Pharmaceuticals, Electrical Distribution, Food & Beverage, Health Care / Medical, HVAC, Plumbing and Lighting, Hydraulics / Pneumatics, Industrial / Machinery, Instrument & Sensors / Laboratory, Marine, Materials, Piping / Pressure Vessels, RF & Wireless / IT & Telecom, Microelectronics / Electronics, Semiconductor / IC Packages, Welding & Fabrication
  • Description: The IC3000 Work/Inspection Station is a flexible modular work station that can be used for multiple purposes. The on-board conveyor accepts product from upstream systems or from Martek Automation’s 1110U Magazine Un-loader and positions them at the work station for assembly, rework
  • Description: Programmable Vision Inspection and Touch Probe CMM ensure that JIT continues to keep up to date with the most challenging quality requirements. Ongoing employee training guarantees that our quality systems continuously progress to keep pace with the most demanding customer expectations. Our Metrology
    • Capabilities: Auditing / Assessment, Consulting / Training, Evaluation, Failure Analysis / Troubleshooting, First Article / Contract QA, Fixtures / Equipment, In-process / In-line Testing, Research and Development
    • Forms Inspected: Components / Parts, Products
    • Services Offered: Dimensional Gaging / Metrology, NDT / Inspection, Visual / Video Inspection
    • Industry Applications: Appliances, Aerospace / Avionics, Automotive, Electrical Distribution, Health Care / Medical, HVAC, Plumbing and Lighting, Industrial / Machinery, Instrument & Sensors / Laboratory, Marine, RF & Wireless / IT & Telecom, Semiconductor / IC Packages, Welding & Fabrication
  • Description: and multiple resolutions the Falcon HG cameras are well suited for applications in electronics inspection, semiconductor inspection, industrial metrology (gauging) and other machine vision applications. These cameras use DALSA CMOS technology for low power consumption enabling them to be compliant
    • Monochrome / Color: Monochrome
    • Imaging Technology / Camera Type: CMOS
    • Specialty Camera Type: High Speed
    • Application / Industry: Other
  • Description: and smoothness with high accuracy, acceleration and stiffness. Used in high precision processing equipment, these motors meet and exceed the rigorous demands required in today’s mfg, assembly, test and inspection environments. Applications include precision stages, semiconductor mfg, inspection systems
    • Linear Motor Type: AC Synchronous Design
    • Design Units: English, Metric
  • Description: Due to their working principle, conventional photoelectric sensors are not always suitable for certain inspection applications. Also, object surfaces that change or reflect poorly can cause unstable detection. On the other hand, a Machine Vision system is often oversized or uneconomical
    • System Type: Embedded / Vision Engine, Modular / PC-Based
    • Applications / Capabilities: Alignment / Guidance, Assembly Quality, Color Mark / Color Recognition, Container or Product Counting, Edge Detection, Electronics or Semiconductor Inspection, Food & Beverage, Gauging, Scanning & Dimensioning, Parcel / Baggage Sorting, Pattern Recognition, Pharmaceutical Packaging, Presence / Absence, Production & Quality Control, Seal Integrity, Tool & Die Monitoring, Web Inspection
    • Image Source: Area Scan Camera, High Speed / Brightness
  • Description: JST offers affordable semi-automated systems in both rotary and linear transfer designs. Rotary Transfer stations can accomodate single or dual rotary arms. JST's robot uses DC servo motors for efficient transfers with high reliability. This servomotor technology provides precise position
  • Description: Aerotech has a long, successful history of developing innovative motion products specifically designed for the semiconductor and photovoltaic manufacturing industries. From printing and scribing to final inspection, our systems are optimized to be the highest throughput, highest accuracy
    • Configuration: X Axis Only, X-Y Axes
    • Orientation: Horizontal, Vertical
    • Bearing / Guide Mechanism Type: Linear Motion Guide
    • Drive Type: Brushless Servo

Conduct Research Top

  • Semiconductor Inspection Equipment (Embedded)
    . Objectives. Customer. Embedding an Industrial PC, GPIB board, digital I/O and image processing board into semiconductor inspection equipment. System computers and image processors need to be compatible and to function accurately when used in semiconductor production machines. CONTEC's Industrial PCs
  • Semiconductor Manufacturing Handbook
    MANUFACTURING. Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing. NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS. Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water. FAB YIELD, OPERATIONS, AND FACILITIES
  • Lubricants For Semiconductor Manufacturing Equipment
    that robots, pick and place stations, conveyors, and other devices on the production line run better when lubricated. But oils and greases contribute to airborne molecular contamination. Worse, they can give off vapors that may fog optics in high-speed inspection systems or may even contaminate
  • Lubricants for Semiconductor Manufacturing Equipment (.pdf)
    , or solid-lubricant. speed inspection systems or even contaminate wafers. thickeners to keep the lubricating fluid where it is needed. Lubricant-related problems, however, can be minimized or. Choosing the proper lubricant for any application requires. eliminated. Case in point: the aerospace industry has been
  • Advances in High Speed Automated Optical Inspection (AOI) Systems (.pdf)
    that reinforce each other. There are also. many instances where improvements in one area increase the requirements in another. Advanced Visual Inspection and High Accuracy Measurement Solutions. For example, faster motion systems with steeper profiles produce significantly more. system vibrations which lead
  • MICRO:Defect Inspection Equipment, by Thomas Reuter (Oct '99)
    Thomas Reuter and Ulrike Bohmler, ; and Matthew McLaren and Siqun Xiao, As design rules continue to shrink, the demand increases for effective inspection tools to detect defects that affect device yields. From front-end-of-line (FEOL) trench etch and interconnect formation steps to back-end
  • Assessing future trends in automated defect inspection and yield management
    Media Kit. Comments? Suggestions? Send us your feedback. MicroMagazine.com VIEWPOINT Assessing future trends in automated defect inspection and yield management (Second of two parts) Paul Sandland The semiconductor industry's push toward smaller geometries and the use of novel
  • 3D Visualization for Industrial Quality Inspection
    with polarised light. y. Semiconductor with coaxial illumination. Semiconductor with directed coaxial illumination. Maximum vertical resolution of Leica DVM systems. Zoom. Depth of field at Vmax. Vertical resolution. Leica VZ75 C @160x. 250 m. 125 m. Leica VZ80 C / Leica VZ80 RC @ 400x. 80 m. 40 m

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