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Semiconductor Measurement Instrumentation

 

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Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.  
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  • Semiconductor: Pure Water and Process Analytics for Semiconductor Applications
    industry. Over the years, Thornton has become the resistivity measurement standard in the semiconductor manufacturing industry. Thornton instruments are specified in the majority of semiconductor manufacturing facilities worldwide to monitor and control ultrapure water systems. Thornton has intimate
  • Semiconductor: Conductivity and pH In HF Etch Solutions
    Hydrofluoric acid (HF) is used in semiconductor processing, glass etching and other industrial processes. The extremely corrosive and toxic nature of HF makes it difficult to handle, requiring special materials of construction. This is also true of the sensors needed for its measurement. The strong
  • High Accuracy Temperature Measurement
    to perform most. The Results. efficiently for an application requires knowledge of. certain key functional characteristics. A thermistor,. Most temperature measurement instrumentation,. for example, is designed for speed and accuracy, but. due to the relatively slow sampling requirements
  • 10 Tips To Ensure Accurate Temperature Measurement (.pdf)
    . TIP 9: Note That Measurement. and inexpensive method to moni-. the way to the instrumentation. Accuracy Is a Function of the. tor temperature of a process. that performs the cold junction. Entire System. without penetrating the pressure. compensation (readout, PLC,. boundary, keeping in mind
  • High Spatial Resolution Measurement of Volume Holographic Gratings
    , the motion of the diffracted beam from reflection gratings requires the detector to move with it, or otherwise the range of angles must be limited. Furthermore it is often difficult to separate the diffraction from the specular surface reflections, increasing the error of the measurement. In the latter
  • Application of the Integrating Sphere Optical Power Measurement System in Laser Diode Characterization
    of the experimental laboratory setup used in the. grating sphere and variety of four semiconductor detector combinations without. calibration of the Integrating Sphere Optical Power Measurement Systems. the use of an attenuator positioned between the detector and the sphere. First a NIST traceable
  • Recent Improvements in Process GC Instrumentation (.pdf)
    , Semiconductor for. more than 20 different species. 12/4/2008. PID Analyzers, LLC. Optional Input Signals. GCDetector. ADC 16 bit. AMP. Up to 10 sensors. Keyboard. Display. PC. DAC to 4-20 mA. Diagnostics. RS232. Digital I/O Alarms. Digital I/O- valves. Time clock, data calc & storage on hard drive
  • Vision Systems for Wafer and Thin-Film Instrumentation
    as high-resolution imagers and precision sample stages or positioners. High resolution and precision positioning is required for the 2D or 3D measurement of semiconductor wafer and thin film surfaces. 

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