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  • Designing Safe, Low-cost Vacuum and Exhaust Gas Management Systems for Semiconductor Processes (.pdf)
    Vacuum and exhaust gas management are critical components of semiconductor manufacturing. While these systems are usually hidden away out of sight-and out of mind-in the process tool or the sub fab, they are vital to efficient and safe manufacturing. Vacuum systems remove potentially hazardous
  • MICRO: Ad hoc metrology
    For Brad Van Eck and the other members of the Integrated Measurement Association (IMA), the benefits of incorporating metrology in semiconductor processes are beyond question. Their next steps are figuring out the most efficient methods, and then convincing the authors of the International
  • Vantage Point: Mechatronics in semiconductor fab automation
    Historically, the semiconductor industry has been driven by physics and chemistry. These are the disciplines that have led to perfecting manufacturing processes that, in turn, have brought remarkable advances in microelectronic technology. In semiconductor manufacturing, the focus has mainly been
  • MICRO: Metrology Start-ups
    to be a semiconductor equipment supplier, right? Some vendors plying their trade in metrology and advanced process control (APC) certainly hope so. Although it seems counterintuitive, it's a truism that when the industry's notorious roller-coaster business cycle heads for the dips, chipmakers actually
  • MICRO: Integrated metrology beginning to measure up to expectations
    Integrated metrology beginning to measure up to expectations Linewidths aren't the only things that are shrinking in the semiconductor industry. Put profit margins in that category, too, asserts Bob Johnson. The principal analyst for Gartner Dataquest says the reasons for this squeeze are fairly
  • MICRO: Defect/Yield Analysis and Metrology - Collins (June 2000)
    The need to improve yield and avoid process errors has been a part of semiconductor manufacturing since the first integrated circuit was made. According to Jack Kilby, a coinventor of the IC, in the early 1960s a respectable yield on a single transistor was 10 or 20%. Today, wafers containing
  • Top technical challenges in semiconductor manufacturing
    Immersion lithography, low-k materials, and metrology are on the list. Chip lithography and front-end fab processes weigh heavily in current research efforts, but also important is the conservation of energy consumption in manufacturing tools, and the growth of environmental regulations. So says
  • MICRO:Analysis and Metrology (Jan '99)
    and Kelly J. Taylor, David A. Rothenbury, Mark Chavis, Timothy Hoff, and Craig H. Huffman, Early detection of process gas contamination is critical to preventing misprocessing of semiconductor product wafers, which usually results in scrap. Waiting for catastrophic contamination to occur

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