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Semiconductor Metrology Equipment

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Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.  
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  • Supplier: Setra Systems
    Description: Applications Laboratory Research & Development Test and Measurement Metrology Analytical Chemistry Systems Semiconductor Process Tools and Equipment Indstrial OEM Systems
    • Device Category: Transducer
    • Pressure Reading: Absolute, Vacuum
    • Sensor Technology: Variable Capacitance
    • Media: Gas
  • Description:
    • Capabilities: Certification, Consulting / Training, Field Evaluation / On-site Inspection, In-process / In-line Testing, Proficiency Testing / Interlaboratory, Test Development, Test Fixtures / Equipment, Testing / Simulation, Specialty / Other
    • Forms Tested / Certified: Capital Equipment, Components / Parts, Facilities / Capital Structures, Samples or Materials
    • Services Offered: Dimensional Gaging / Metrology, NDT / Inspection
    • Industry: Aerospace / Avionics, Building & Construction, HVAC, Plumbing and Lighting, Industrial / Machinery, Materials, Nuclear / Utility, Piping / Pressure Vessels, Semiconductor / IC Packages, Valves / Pumps, Welding & Fabrication
  • Description: parameters, save process readings in Excel formatted files and operate the monitor remotely. Monitors are Class 1 Equipment CE approved. Features and General Specs: 2 crystal or 4 crystal input models available 0 to 50 degrees C temperature range 6.0 to 4.0 MHz frequency range
    • Form Factor: Monitor / Instrument
    • Applications: Semiconductor Wafers
  • Description: For special applications we can also supply cluster systems based on the UNIVEX concept. These clusters are equipped according to customers requirements and incorporate separate processing and load lock and transfer chambers.
    • Coating Process: Physical Vapor Deposition (PVD), Specialty / Other
    • PVD Processes: Evaporation - Electron Beam, Evaporation - Resistance, Sputtering - DC, Sputtering - RF
    • Configuration: Outfit / Complete System
    • Components / Features: Gas Control / Regulator, Integral Process Controller, Metrology / Film Monitor, Multiple Sources, Vacuum Pump
  • Description: The Leica EM CED030 is a compact bench-top single and multiple carbon thread evaporation device for producing conductive carbon films on specimens for X-ray microanalysis (EDX, WDX) and carbon reinforcement films on collodium or formvar coated specimen support grids for TEM.
    • Coating System Type: Laboratory / Benchtop
    • Technology / Process: Physical Vapor Deposition (PVD)
    • PVD Processes: Other
    • Applications & Materials Processed: Semiconductor Manufacturing, Research / Surface Analysis
  • Description: distribution over the wafer surface to identify "hot spots" — out to zero edge exclusion. All of these features are housed in a new, compact, and efficient design. Access for all maintenance work is through the front and rear panels, so other cleanroom equipment may be placed next
    • Form Factor: Monitor / Instrument
    • Mounting / Loading: Floor Mounted / Stand-alone
    • Applications: Semiconductor Wafers
    • Measurement Capability: Particle Contamination
  • Description: in three locations which maintain positive pressure. The air is changed 15 times per hour and humidity is perfectly controlled. Our labs house the most technologically advanced equipment available so that ALL your metrology and inspection needs may be conveniently met by MSI Viking Gage.
    • Capabilities: Certification, Component / Product Comparison, Consulting / Training, Failure Analysis / Troubleshooting, Field Evaluation / On-site Inspection, First Article / Contract QA, In-process / In-line Testing, Proficiency Testing / Interlaboratory, Reverse Engineering / Digitization, Test Development, Test Fixtures / Equipment, Testing / Simulation, Specialty / Other
    • Forms Tested / Certified: Capital Equipment, Components / Parts, Products, Samples or Materials, Services
    • Services Offered: Alignment, CMM Inspection, Dimensional Gaging / Metrology, Engineering / Design Verification (DVT), Form / Geometry (Straightness, Roundness, etc.), NDT / Inspection, Surface Profilometry, Visual / Video Inspection, Specialty / Other
    • Industry: Appliances, Aerospace / Avionics, Automotive, Battery / Energy Products, Building & Construction, Combustion Equipment, Consumer Products, Health Care / Medical, HVAC, Plumbing and Lighting, Industrial / Machinery, Instrument & Sensors / Laboratory, Materials, Motors and Control Systems, Nuclear / Utility, Paper / Plastic Packaging, Piping / Pressure Vessels, Power Generation, RF & Wireless / IT & Telecom, Rubber / Latex, Microelectronics / Electronics, Semiconductor / IC Packages, Valves / Pumps, Welding & Fabrication, Specialty / Other
  • Description: If you require Metrology done right, please include JIT Global on your vendor list. With over 60 years of combined experience in inspecting for quality issues (including Gage R&R, PPAP ,and 1ST Article inspection) you can trust our results. As an ISO 9001:2008 certified company, JIT Global
    • Capabilities: Auditing / Assessment, Consulting / Training, Evaluation, Failure Analysis / Troubleshooting, First Article / Contract QA, Fixtures / Equipment, In-process / In-line Testing, Research and Development
    • Forms Inspected: Components / Parts, Products
    • Services Offered: Dimensional Gaging / Metrology, NDT / Inspection, Visual / Video Inspection
    • Industry Applications: Appliances, Aerospace / Avionics, Automotive, Electrical Distribution, Health Care / Medical, HVAC, Plumbing and Lighting, Industrial / Machinery, Instrument & Sensors / Laboratory, Marine, RF & Wireless / IT & Telecom, Semiconductor / IC Packages, Welding & Fabrication
  • Description: CLZ Series Small Compression Load Cell Rated Capacity: 2.5N…5N (255gf…510gf) Material: Aluminum Features Low cost Complies to unexpected load by built in mechanical stopper Thin type design Applications Wafer measurement & control for semiconductor production
    • Application: Metrology, Other
    • Force Measured: Compression
    • Load Cell Package: Pancake
    • Sensor Technology: Strain Gauge
  • Description: Stork experts measure up For projects that require accurate dimensional measurements, Stork Materials Technology dimensional scientists measure up in every way: capabilities, expertise, timeliness, and presentation of your results. Our professional inspection team uses cutting-edge measuring
    • Capabilities: Certification, Component / Product Comparison, Failure Analysis / Troubleshooting, Field Evaluation / On-site Inspection, First Article / Contract QA, In-process / In-line Testing, Reverse Engineering / Digitization, Test Development, Test Fixtures / Equipment, Testing / Simulation, Specialty / Other
    • Forms Tested / Certified: Capital Equipment, Components / Parts, Facilities / Capital Structures, Products, Samples or Materials
    • Services Offered: Alignment, Dimensional Gaging / Metrology, Engineering / Design Verification (DVT), Form / Geometry (Straightness, Roundness, etc.), NDT / Inspection, Visual / Video Inspection, Specialty / Other
    • Industry: Appliances, Aerospace / Avionics, Automotive, Battery / Energy Products, Building & Construction, Combustion Equipment, Consumer Products, Health Care / Medical, HVAC, Plumbing and Lighting, Industrial / Machinery, Instrument & Sensors / Laboratory, Materials, Motors and Control Systems, Nuclear / Utility, Paper / Plastic Packaging, Piping / Pressure Vessels, Power Generation, RF & Wireless / IT & Telecom, Rubber / Latex, Microelectronics / Electronics, Semiconductor / IC Packages, Valves / Pumps, Welding & Fabrication, Specialty / Other
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Conduct Research Top

  • MICRO: Ad hoc metrology
    For Brad Van Eck and the other members of the Integrated Measurement Association (IMA), the benefits of incorporating metrology in semiconductor processes are beyond question. Their next steps are figuring out the most efficient methods, and then convincing the authors of the International...
  • MICRO: Metrology Start-ups
    to be a semiconductor equipment supplier, right? Some vendors plying their trade in metrology and advanced process control (APC) certainly hope so. Although it seems counterintuitive, it's a truism that when the industry's notorious roller-coaster business cycle heads for the dips, chipmakers actually...
  • MICRO: Integrated metrology beginning to measure up to expectations
    Integrated metrology beginning to measure up to expectations Linewidths aren't the only things that are shrinking in the semiconductor industry. Put profit margins in that category, too, asserts Bob Johnson. The principal analyst for Gartner Dataquest says the reasons for this squeeze are fairly...
  • Developing an exit charge specification for semiconductor production equipment
    and Julian A. Montoya, Static charge can cause several kinds of problems in semiconductor manufacturing, including process equipment malfunctions, damaged products, and contamination attraction to product surfaces. Simple calculations indicate that the costs of these problems run in the hundreds...
  • MICRO:Analysis and Metrology (Jan '99)
    companies of the consortium. Huffman championed process equipment characterization studies conducted at Sandia National Labs that led to process, tool, and data management improvements benefiting the semiconductor industry. He has also been involved in several studies where sensors were used to improve...
  • MICRO: Defect/Yield Analysis and Metrology
    Oliver D. Patterson and Horatio Wildman, Doron Gal and Kevin Wu, In-line voltage contrast inspection is a well-developed method for detecting hard shorts and opens. The technique is quite commonly used in the semiconductor industry to detect contact and via opens as well as metal, gate-level...
  • MICRO:Analysis and Metrology-Yield Management, by David Guidry (Oct '99)
    Shawn Smith and David Guidry, Knights Technology, a division of Electroglas In the semiconductor industry, bitmapping has always been a key element in yield enhancement engineers' tool set for determining the root cause of low-yielding materials. Indeed, in the mid- to-late 1980s, memory bitmapping...
  • MICRO:Analysis and Metrology-Yield Management, by F. Bergeret, p.59 (March '99)
    and Metrology-Yield Management, by F. Bergeret, p.59 (March '99) MICRO Advertiser and Product Information Buyers Guide ** New **. Greatest Hits of 2004. Featured Series Web Sightings Media Kit. Subscribe...
  • Top technical challenges in semiconductor manufacturing
    . Advertisement. Products. CAD Library. eBooks. Audio / Videos. Training Center. Whitepapers. Reference Centers. Top technical challenges in semiconductor manufacturing. July 7, 2005. Staff. Immersion lithography, low-k materials, and metrology are on the list. Printer-friendly version. Chip lithography...
  • Designing Safe, Low-cost Vacuum and Exhaust Gas Management Systems for Semiconductor Processes (.pdf)
    , and corrosive by-products are present. Depending on the. application, the pump may be installed inside the process equipment, near the equipment, or. in a remote location. Pump applications include: load lock and transfer, metrology,. lithography, implant source, PVD processes and pre-clean, RTA, strip...

Engineering Web Search: Semiconductor Metrology Equipment Top

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