Meldin® 7000 series materials are ideal for semicon equipment chamber applications due to their high purity, low outgassing, superior plasma etch resistance, and other
properties. Meldin 7001, the unfilled thermoset polyimide grade, is widely used in semicon equipment such as CVD, PVD, sputtering, and other equipment. Typical Meldin 7001 components include clamp rings, coil keepers, focus rings, lift pins, lift pin holders, chamber gaskets, glass guides, and other components. Due to its good...
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