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Semiconductor Sputtering Target

 

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  • Sputtering Targets and Sputtered Films: Technology and Markets
    fabricated in a variety of shapes, sizes, and materials, to obtain thin films with desired properties during fabrication of a broad range of advanced devices and coatings. This study covers the utilization of sputtering targets in 25 applications (e.g., semiconductors, passive components, optical
  • A Room Temperature, Low-Stress Bonding Process to Reduce the Impact of Use Stress on a Sputtering Target Assembly (.pdf)
    As semiconductor processing has moved to 300mm wafers, the size of deposition targets, including tungsten, tantalum, and molybdenum has grown, and process complexity has increased as well. This added size and complexity contributes to the stress on a target assembly during the physical vapor
  • MICRO: Controlling particles in sputter deposition modules
    of particle contamination are generally found within the deposition module itself. Research and development studies performed by Trikon Technologies (Newport, UK) have identified various potential sources of contamination within its Sigma sputter deposition module. After briefly describing the sputtering
  • EETimes.com | Electronics Industry News for EEs & Engineering Managers
    Holding AG alleging patent infringement on hard disk sputtering technology. Analog Devices plants DSP on TI's doorstep Analog Devices Inc. is creeping up on rival Texas Instruments Inc. in unexpected ways. Weak microprocesor market dampens earnings picture Like the lazy days of summer, it has been
  • MICRO: Process Tool Support
    semiconductor manufacturing processes, some of which are also used in the manufacture of disk media and flat-panel displays. Processes that deposit thin films, such as sputtering and CVD, and processes that remove thin films, such as plasma etching and CMP, are especially prone to contamination from process
  • MICRO: Lead
    an "alliance," says its new Commodity Consumables Services initiative will offer fabs one-stop shopping for generic commodities such as O-rings, seals, and filters. The Connecticut-based unit of Praxair specializes in gases, materials, sputtering targets, slurries, and other process consumables
  • EETimes.com | Electronics Industry News for EEs & Engineering Managers
    U.S.-based Intevac has apparently filed a patent infringement lawsuit in U.S District Court in Los Angeles against Switzerland's Unaxis Holding AG alleging patent infringement on hard disk sputtering technology. Blaze DFM says new MO release up to 5X faster Blaze DFM released version 1.1
  • MICRO: Product Technology News (January 2001)
    Plus aluminum sputtering target for advanced semiconductor manufacturing features fine average grain size and low particle generation for optimal film uniformity and

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