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  • Central Air Abatement System (CAAS) Scrubbing in Semiconductor Manufacturing (.pdf)
    A number of sources in the semiconductor manufacturing process produce diluted levels of acid gases, silanes, ammonia and some organics. The most common gases are hydrochloric acid (HCl), hydrofluoric acid (HF), hydrobromic acid (HBr), phosphoric acid (H3PO4), nitric acid (HNO3) and ammonia (NH3
  • ACETIC ACID RELEASE DURING SILICONE RTV CURE
    Single component room temperature vulcanizing ('RTV') silicones are widely used as sealants and adhesives in the fabrication of many products; including medical devices. For 'acid cure' systems, exposure of the material to atmospheric moisture initiates a catalyzed reaction of the acetoxy silane
  • Coupling Agents
    Coupling agents such as silanes or zirconates are used to enhance the chemical bond between reinforcements such as glass fibers and the plastic resin matrix. Coupling agents have SiO groups to bond to the inorganic filler, as well as functional groups that react with the resin system. Coupling
  • Adhesion Promotion on Inorganic or Organic Substrates (.pdf)
    promoters as part of a pre-. treatment method. ADHESION PROMOTERS FOR METAL AND. HIGH-SURFACE-ENERGY INORGANIC SUBSTRATES. The most common commercial adhesion promoter is based. around silane coupling agents. Silanes are most often used to. Figure 2. Effectiveness of Silanes on Different Substrates
  • MICRO: World Beat
    009;Praxair's joint venture in Taiwan has opened the country's first transfill plant for silane. The plant is operated by Praxair Chemax Semiconductor Materials, a partnership between the Connecticut-based industrial gases manufacturer and China Petrochemical Development of Taiwan. The automated
  • INDUSTRY NEWS
    for incoming material. The company reported no injuries. The area contained "a small number of nontoxic, pure silane gas cylinders, " according to the vendor. Electrical power and gas that were shut down during the fire were restarted by late afternoon, August 25. Lost silane inventory was replaced
  • MICRO: Ultrapure Gas Delivery - Gotlinsky (July 2000)
    Barry Gotlinsky and Joseph O'Sullivan, ; and Motonobu Horikoshi and Shinichi Babasaki, Parts-per-trillion-level purification of process gases can be obtained with a new purification technology and confirmed through APIMS measurements. Silane and other process gases used for thin-film formation
  • TCS Process Vent Scrubbing (.pdf)
    efficiencies of silane. and HCl gases. Wastewater streams were minimized to. Application. Silane & HCl Scrubbing. reduce water consumption and treatment costs. Exhaust Volume . 4,500 CFM. Verantis can provide waste treatment solutions for. silanes that are customized based on waste flow-rates,. Exhaust

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