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Supplier: KLA-Tencor Corporation
Description: algorithms, the Surfscan SP2 wafer surface inspection tool finds defects down to 30nm in size, and enables consistent, high sensitivity detection on engineered substrates such as strained silicon and SOI. This wafer surface inspection tool is a
- Form Factor: Wafer Probing System
- Mounting / Loading: Floor Mounted / Stand-alone
- Applications: Semiconductor Wafers
- Measurement Capability: Defects / ADC
Technical Courses and Programs - Predicting, Modeling, and Interpreting Light Scattered by Surfaces -- SC492Supplier: SPIE - Education
Description: The measurement of light scattered by surfaces can be used to locate and identify roughness, particulates, and defects on a wide variety of materials. Applications include the inspection of silicon wafers, optics, and storage media, characterization of thin film roughness,
- Modality: On-site / In Plant
- Technology / Subject: Design / Engineering Methods (ESDU, DFx, etc.), Photonics / Optics
Description: CoorsTek offers a full line of air-bearing guideways and structural precision components. A high specific stiffness and excellent thermal stability make our ceramic beams and stage components ideal for coordinate measurement machines, semiconductor lithography and wafer inspection,Show More
Supplier: Technic, Inc.
Description: System Overview The SEMCON 4000 is an automatic loading and unloading “wet bench” type wafer Under Bump Metalization tool, designed with processes for Nickel and Gold metalization of silicon and Ga/As wafers with aluminum or copper seed layer. The Semcon 4000
- Process / Technology: Electroplating
- Application / Industry: Semiconductor / Wafer, Solar / Photovoltaic
- Equipment / System Type: Automated System
Description: a process-agnostic platform capable of rapid reassignment as business demands dictate. DirEKt Ball Attach to wafers or substrates, at ball diameters down to 0.2mm; wafer bumping by solder paste printing; SMT pre-placement for next generation assemblies including "silicon dust"Show More
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Technical Glass Products, Inc. - OH
Fused Quartz... processing of silicon wafers.
combination of high purity and mechanical stability at high temperatures, is the ideal material used in the processing of silicon wafers. Technical Glass Products uses only the highest grade raw materials, offering contaminant levels less than 25?ppm. Quartz tubing is (read more)
Browse Quartz Tube and Rod Datasheets for Technical Glass Products, Inc. - OH
Exceptionally tight TTV sapphire wafer carriers
Ceramic Solutions to Compound Semiconductor Tooling Insaco precision machines technical CERAMICS to meet customer specifications for intricate and critical applications including exceptionally tight TTV sapphire wafer carriers (read more)
Browse CNC Machining Services Datasheets for Insaco, Inc.
X.Tract provides CT-quality inspection results
X.Tract provides CT-quality inspection results of complex, multi-layer electronics assemblies without slicing them. In a rapid and user friendly process, itenables virtual micro-sections in any direction in the region-of-interest. X.Tract reveals defects that are obscured in 2D X (read more)
Browse X-ray Instruments and X-ray Systems Datasheets for Nikon Metrology
Extended Wavelength LED Emitters
, anti-counterfeiting currency validation, fiber optics, produce inspection systems, and more. Solutions for your SWIR application Marktech Optoelectronics, a Latham, New York-based is one of only a handful of manufacturers that supply emitters in the extended (read more)
PlanarHDX planar air bearing platform
Aerotech has developed the PlanarHDX, the most advanced commercially available planar air-bearing platform for semiconductor manufacturing and advanced test and inspection. The PlanarHDX was designed using an FEA-optimized silicon carbide structure (read more)
Browse Linear Slides and Linear Stages Datasheets for Aerotech, Inc.
ZMI ™ Displacement Measuring Interferometers
facilities. Typical Applications • Lithography tools: optical lithography steppers and scanners, e-beam & laser mask writers • Metrology tools: Mask and wafer inspection and measurement tools, CD-SEMs • Calibration: Measurement and calibration of (read more)
Browse Interferometers Datasheets for Zygo Corporation
Insaco solves unique problem
your local Home Depot since the costs of producing and then machining Silicon Nitride make them quite expensive. However, for certain unique situations, these special tools are able to do the job no steel wrenches can. For more information (read more)
Browse Ceramic Fabrication Services Datasheets for Insaco, Inc.
Technical Glass Products, Inc. - OH
SEMICONDUCTOR GRADE FUSED QUARTZ!
SEMICONDUCTOR GRADE FUSED QUARTZ Fused quartz, with its combination of high purity and mechanical stability at high temperatures, is the ideal material used in the processing of silicon (read more)
Browse Glass Tube and Rod Datasheets for Technical Glass Products, Inc. - OH
Optical Angle Encoders, High-Precision Encoders
system architecture that eliminates Abbe error, provide the highest possible positioning accuracy. Laser encoders offer precision feedback for a variety of applications, ranging from long axis machine tools to X-Y wafer inspection systems. Optical linear and angle encoders offer easy (read more)
Browse Incremental Rotary Encoders Datasheets for Renishaw
PI (Physik Instrumente) L.P.
Piezo Stage Package
Information Applications of the PInano II Fields of applications include microscopy, confocal microscopy, 3D imaging, screening, autofocus systems, surface analysis, and wafer inspection (read more)
Browse Microscope Stages Datasheets for PI (Physik Instrumente) L.P.
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MICRO: E A & A
KLA-Tencor and Soitec have joined forces to develop the first wafer-inspection system optimized for silicon-on-insulator (SOI) applications in the 90- and 65-nm nodes. The tool will be based on KLA-T's Surfscan SP1 platform, with the initial system shipping to Soitec's Bernin, France, site in early
MICRO: Product Technology News (September 2000)
comparable to that of pumps for 200-mm processes. They offer high pumping speeds, quiet operation, ease of control, and low cost of ownership for the difficult etch, PECVD, and LPCVD processes used in silicon wafer and flat-panel display manufacturing. Two systems added to the NSX series perform
The Reflex Auto system can detect defects as small as 90 nm on 50 -200-mm wafers. The tool, which is distributed in the United States by Hologenix, consists of a defect-inspection module, a robot with an integrated notch/flat aligner, and an open cassette. Customized versions are also offered
The WM-5000 unpatterned-wafer inspection system for 0.07- um design rules uses a 400-nm-wavelength laser light source (a violet laser diode). Distributed by Macrotron Process Technologies in Europe, the tool achieves very high detection sensitivity down to 0.041 um. The system can inspect 100
MICRO:Archive:Back Issue TOC
cleaning systems, particle detection system, silicon-on-quartz wafers, yield management software, linear motion guide, flame detector, brushless linear motors, Teflon bellows, rapid thermal processing tool, poly etch system, critical dimension SEMs, flow switches, web-enabled tool connectivity
and students. the 40 most popular products of 2000, including wafer shipping boxes, transport robots, lithography tools, copper-cleaning products, mass-flow controllers, wafer dryers, copper-stripping systems, and an array of valves, regulators, sensors, pumps, and detectors. Silicon Valley plugs
MICRO: 2001 Back Issues
Wider 'Net-based tool diagnosis is becoming a remote possibility Applied enters yet another market segment with introduction of Swift implantation tool New head of silicon house foresees 5 19% rise in wafer reclaim prices IBM drops $5B bombshell; Pentagon opens parts cleaning plant; Cymer acquires
MICRO: Product Tech News
To accelerate transistor innovation at the 65- and 45-nm nodes, the eS32 E-beam inspection tool captures subtle electrical defects and small physical ones. The system offers features that accelerate the detection and resolution of systematic, yield-limiting defects in both front-end and back-end
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Discrete source method for spectroscopic analysis of nano-particles on a plane
For example, PSL nano- particles are used for the calibration of surface scanners, which are used as silicon wafer inspection tools .
Amorphous Silicon / Crystalline Silicon Heterojunction Solar Cells
And they are common tools for silicon wafer inspection before processing.
Optical surface analysis: a new technique for the inspection and metrology of optoelectronic films and wafers
Particle size may also be calibrated using polystyrene latex (PSL) spheres, which is the standard way of calibrating particle counting tools used for silicon wafer inspection .
On the characterisation of grown-in defects in Czochralski-grown Si and Ge
Recently similar defects were observed on polished Cz Ge wafers using optical and scanning electron microscopy and the same surface inspection tools as used for silicon wafers .
Wafer inspection as alternative approach to mask defect qualification
A line/space pattern with programmed defects was inspected on test wafers (resist on bare silicon ) with a KLA 2800 wafer inspection tool .
Cross-correlation between actinic and visible defect inspection tool for extreme ultraviolet lithography
Because the EUVL mask blank substrate for the reflective Mo/Si or Mo/Be multilayer coating has the form factor similar to that of a standard silicon wafer , optical scattering wafer inspection tools have been used for routine inspection of EUVL mask blanks.
Corrective actions for stainless-steel-particle-related burn-in failures
The Silicon wafer is inspected in a Tencor tool to check that initial counts are low enough.
Defect metrology challenges for the 45-nm technology node and beyond
Figure 4: While current unpatterned wafer inspection tools are adequate on bare silicon , it is very difficult to detect defects of smaller size on rough films.