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  • Flare Gas Measurement and Recovery of Fuel Feed Gas with Residual Oxygen Calorimetry
    This paper describes a flameless gas calorimeter that measures CARI Index, Wobbe Index, calorific value, and specific gravity in a real-time basis. The flare or fuel feed gases are oxidized in a catalytic converter and the residual oxygen from the reaction is correlated to the measurement
  • Monitoring slurry stability to reduce process variability
    pH, specific gravity, percent solids by weight, and slurry particle size distribution are measured after mixing for both oxide and tungsten slurries as part of CMP process control. Some of these properties are more relevant than others as a monitor of slurry health, and other parameters

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