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  • Fall-of-Potential Ground Testing, Clamp-On Ground Testing Comparison
    On April 14, 2002, a ground resistance test was conducted to compare the results obtained from the Fall-of-Potential 3-Point testing method to the clamp-on testing method. The grounding system consisted of four copper clad rods installed in an approximate 20 ft square. Three of the rods are 5/8
  • Plastics for plasma etching
    It's a mistake to assume wafer clamp rings have to polyimide. Several other work about as well. Some surprising conclusions came out of clamp-ring material tests, which took place in a plasma-etch equipment from Tek-Vac Industries Inc. Each process chamber (square boxes, left and right) handles
  • Steppers go shaftless
    of the IOS Size 17 motor, and the device's mechanical power performance curves. Two sizes (1.7-in. square and 3.37-in. square) provide from 10 to 175 W, respectively, in rotary operation. Systems integration has been a buzz-phrase for many years. In the motioncontrol world, it's also been a dawning

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