Step Height Measuring Equipment

Conduct Research

• Low-Risk Lyophilization
  . A non-destructive, spectrophotometric moisture test (measuring through the glass) may prove invaluable as a development tool since those same vials may then be analyzed to determine their impurity profile. While not typically part of a normal QC release regimen, proper equipment and technique may...
• Mining the Hidden Factory
  is moving through a defined distance along a curved track). Drug companies embarking on an OEE program typically start with their discrete processes, probably because they are better defined and fairly straightforward for measuring and analyzing event times and speeds. However, OEE can also be applied...
• MICRO:Product Technology News (March '99)
  Equipped with a front-opening unified pod, the V 300-SL surface profiler enables users to monitor process wafers in a fully automated environment. Stylus-based measurement technology provides step height repeatability for monitoring the uniformity of etch and deposition processes. The profiler's...
• MICRO: Advanced Process
  over an STI trench. The first is that profilometer technology is based on measuring the deflection of a stylus affixed to the tip of a cantilever beam. As the stylus is physically dragged across the surface of the wafer, as illustrated in Figure 3, it records the step height of the structures...
• MICRO:Top 25 (November/December 2002)
  is available in wafer sizes of 300, 200, and 150 mm. A large calibration area of 800 800 um extends product lifetime, since the user is not limited to measuring in the same spot continuously. A UPW boron analyzer measures parts-per-trillion levels of boron in DI- and ultrapure-water applications...
• MICRO: Product Technology News (June '2000)
  abrasion. A built-in step ledge facilitates boot removal so that stress on the fabric and seams is minimized. Featuring a sealed-for-life, direct-drive gear system, the Axys 407 atmospheric robot provides reliable, repeatable wafer transfer into and out of process tools. The robot incorporates four...
• Product Technology News
  accurate measurements and a one-step zooming capability. Nondestructive imaging is performed with low-amplitude cantilever oscillation to protect fragile surfaces from probe damage. The instrument can be configured to accommodate scanning modes such as contact, near-contact, and noncontact AFM...
• Evaluating 300-mm fab automation technology options and selection criteria
  that delivery times are adequate using techniques described in the second step or using a simulation tool. Equipment AGV RGV Hoist A) Transport workrequirement (mv-ft/hr) Req't Req't Req't B) Base unit transportcapacity (mv-ft/hr) Vendor Vendor Vendor C) Incremental unitcapacity (mv-ft/hr) Vendor Vendor...
• MICRO: Defect/Yield Analysis & Metrology
  . Length (um). 75. 75. Stacked. 3,354. 75. 75. Solo. 7,044. 100. 100. Stacked. 5,000. 30. 30. Stacked. 9,922. 100. 100. Stacked. 10,869. Table I: Average planarization length determined for various representative process conditions using optoacoustics. Measuring Film Thickness after Initial Polish Step...
• Keeping Thrust Bearings Cool
  oil-film pressure that supports greater bearing load, sometimes up to 300 psi. For typical “square” segments where radial length L equals circumferential breadth B, the optimum step location is at 50 to 55% of B from the leading edge of the segment. Step height should be 0.7 times the trailing edge film...

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