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• dichlorosilane. Flammables. • arsine. • germane. • silane. • diborane. • hydrogen. • trichlorosilane. • dichlorosilane. • phosphine. • stibine. Bulk Gases. • CDA (clean dry air). • hydrogen. • nitrogen. • argon. • helium. • oxygen. becomes even smaller, about 0.025 µm. (For compari-. ardous gases contained...

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Shimadzu Scientific Instruments, Inc.
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Oxford Instruments Industrial Analysis
Oxford Instruments Industrial Analysis