The MEMS based sensing elements give the MFC2122 a 150 ms settling time. Making it ideal for precise
flow control despite rapid disturbances (i.e. pressure pulses). Designed for 10 to 3000 sccm
flows (full scale, N2 equivalent) of Air, N2, O2, Ar, CO2, He, and H2. Analog (0 to 5 V, 4-20 mA) and Digital (RS-232, RS-485) interfaces are available. With the capability of holding multiple calibration curves, the MFC2122 enables flexible integration options to the OEM and system integrator...
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