Thermal Management Material Metrology

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• MICRO: Metrology Start-ups
  start-ups, spin-offs turned up business in downturn. GOOD AS GOLD: Qcept's contact potential difference imaging technology can detect less than a monolayer of material. The raised areas in the wafer map (inset) represent areas of deposited gold on a 100-mm silicon wafer. Graph shows gold surface...
• MICRO: Defect/Yield Analysis and Metrology - Collins (June 2000)
  , and the red line represents the echo pattern predicted by the metrology tool's modeling algorithm. The algorithm takes into account many parameters, including the velocity of sound in the film material, film density, and the optical properties of the film. This model-based approach allows multiple...
• MICRO: Products
  and a common single-wafer end station. Thermal Metrology Tool. SensArray. Fremont, CA. A metrology system for advanced lithography tracks with two or more robot arms, Accura C optimizes equipment and system-to-system performance by providing customers with precise thermal data from real-time measurements...
• MICRO: Products
  requirements of smaller gas panels and cabinets. Durable and well-matched materials (including corrosion-resistant Incoloy nickel-based alloy) provide low thermal coefficients for performance over a wide range of ambient temperatures. A microprocessor-based digital backbone optimizes the sensor's...
• Miniature Linear Encoders
  and low-k material preservation and has a wide process window. The NT integrated flow controller helps semiconductor equipment manufacturers perform chemical handling and blending close to the point of use. The controller's small footprint saves space in liquid-handling systems and allows toolmakers...
• MICRO: Product Tech News
  in diameter, including thermal slip dislocations, edge damage, and other crystallographic defects. By identifying and quantifying defective material early in the processing stage, the tool helps increase yields. It is used in high-volume manufacturing applications, delivering quantitative data that enable...
• MICRO: Archive: Back Issue TOC
  Materials scores funds. THE HOT BUTTON. Metrology: Starting-material, engineered-substrate demands put. added pressure on wafer suppliers, metrology providers. REALITY CHECK. Columnist Bijan Moslehi looks at 300-mm manufacturing. TECHNICAL ARTICLES. Special Apps: Introducing wide-band-gap silicon...
• MICRO: Products
  for material removal, flatness, and surface finishing. Its menu-driven microprocessor controls enable operators to fully optimize any polishing, delayering, or planarization process. The system's oscillation system provides 3-axis motion for true chemical-mechanical polishing kinematics. It uses...
• MICRO:Product Technology News (April '99)
  The KA250 wafer carrier is molded of PEEK and a polycarbonate to ensure low-particulate operation and dimensional stability. The carrier's wafer and equipment contacts are made of Stat-Pro 3000, a static-dissipative PEEK material, while a polycarbonate is used in the frame and end wall. The design...
• MICRO: Product News
  . A wetted inner liner of pure virgin HDPE material provides superior trace-metal and particle performance. The company's stringent testing verifies the drum's safety, long-term strength, and resistance to environmental exposure. Modular Process Control. Burkert Contromatic. Irvine, CA. The AirLine...

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