Thin Film Probing System

Description: Built-in anti-vibration support

• Form Factor: Wafer Probing System
• Mounting / Loading: Floor Mounted / Stand-alone
• Applications: Semiconductor Wafers
• Measurement Capability: Electrical Test - Parametric / In-line

Description: MERMAID is a unique measurement instrument for analysis of liquid and thin film properties using magnetoelastic resonance (MER) sensors. Dynamic events such as viscosity change, phase transitions or bio film growth can be analyzed. The MER sensor can measure properties of either a coating on top

• Form Factor: Wafer Probing System, Sensor / Sensing Element
• Mounting / Loading: In-situ / System Mounted, Floor Mounted / Stand-alone
• Applications: CVD / PVD Films, Polymers / Photoresists, Other
• Measurement Capability: Deposition Rate, Endpoint Detection / Plasma Diagnostics, Thickness - Film / Layer, Other

Description: SensArray Process Probe 1630 instrumented wafers enable precise in-situ characterization of wafer temperature profiles in both front-end atmospheric and belt CVD systems, and in back-end wafer solder bumping reflow ovens. Utilizing the patented ThermaBond technique, the embedded thermocouple bond

• Form Factor: Wafer Probing System
• Applications: Semiconductor Wafers, CVD / PVD Films, Etching - Plasma / Wet
• Measurement Capability: Other
• Technology: Other

Description: Test heads for LIV, wavelength and FFP slide above the packages to minimize machine size and package handling. Lasers are aligned using the vision system to achieve test data accuracy . An optical fiber for wavelength can move independently in X & Y to measure each VCSEL accurately .

• Form Factor: Monitor / Instrument, Wafer Probing System
• Mounting / Loading: Floor Mounted / Stand-alone
• Applications: Semiconductor Wafers, Packaged ICs / Ceramic Substrates
• Measurement Capability: Electrical Test - Parametric / In-line, Electrical Test - Wafer Sort / Functional, Other

Description: The Process Probe 2070 instrumented glass tiles offer a cost-effective and flexible solution for reliable in situ characterization of glass temperature profiles many flat panel processing applications. Employing a number of small, instrumented glass tiles rather than a single, large panel of glass,

• Form Factor: Wafer Probing System
• Mounting / Loading: In-situ / System Mounted
• Applications: Semiconductor Wafers, CVD / PVD Films, Etching - Plasma / Wet
• Measurement Capability: Other

Description: with considering the total system performance. This results in exceptional stability, milling performance and resolution, allowing e.g. automated mill-and-monitor operations for 3D reconstructions with slicing steps down to 5nm. NB5000 incorporates two sample stages - one conventional eucentric stage

• Form Factor: Wafer Probing System
• Mounting / Loading: Floor Mounted / Stand-alone
• Applications: Semiconductor Wafers, CVD / PVD Films
• Measurement Capability: Critical Dimension / Trench Geometry, Shape / Flatness, Thickness - Film / Layer

Description: The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia.

• Form Factor: Controller, Wafer Probing System
• Mounting / Loading: In-situ / System Mounted
• Applications: Etching - Plasma / Wet, Other
• Measurement Capability: Deposition Rate

Description: stacks using spectroscopic ellipsometry (SE) Precisely measures advanced, ultra-thin gate dielectric films Develops and optimizes thin film dispersion models offline Provides the accuracy, repeatability, and system-to-system matching required to monitor advanced ICs with geometries as small

• Form Factor: Wafer Probing System
• Mounting / Loading: Floor Mounted / Stand-alone
• Applications: Semiconductor Wafers, CVD / PVD Films, Etching - Plasma / Wet, Photolithography / Patterning, Polishing / CMP
• Measurement Capability: Thickness - Film / Layer

Description: The Optistation-V offers an ergonomic design and a user-friendly operating environment. This compact-size wafer inspection system also offers high accuracy and high throughput. The Optistation-V macro illuminators simplify visual macro inspections of unevenness, defocus, and other items that had

• Form Factor: Wafer Probing System
• Mounting / Loading: Floor Mounted / Stand-alone
• Applications: Semiconductor Wafers
• Measurement Capability: Defects / ADC

Description: The Proforma 300 is completely menu-driven. The on-board intelligence provides fast, accurate, repeatable measurements for all types of wafer materials. Maximum measurement range or maximum probe/wafer stand-off distance can also be adjusted to meet your specific requirements. Features:

• Form Factor: Wafer Probing System, Sensor / Sensing Element
• Mounting / Loading: Manual Loading
• Applications: Semiconductor Wafers
• Measurement Capability: Roughness / Waviness, Shape / Flatness, Thickness - Wafer / Disc (TTV)