Titanium Oxide Membrane

Conduct Research

• Evaluating the performance of polysulfone membrane filters in SC-1 chemistries
  process modules on this bench: a piranha (H2SO4/O3) clean, a buffered oxide etch (BOE), a hydrofluoric acid (HF) bath, an SC-1, an SC-2, and an isopropyl alcohol (IPA) dry. Each process module except the IPA dry is followed by a DI-water rinse. The SC-1 process tank is a megasonic (300-W) unit constructed...
• MICRO: Behind the Mask - Walker (February 2001)
  composed of titanium nitride, chromium, or tantalum nitride, which is deposited on top of a stop layer for both the absorber etch and absorber repair steps. This stop layer is usually a buried silicon oxide that is ~50 100 nm thick. A multilayer reflector of alternating ultrathin molybdenum and silicon...
• Using microtechnology to get to nanotechnology
  activity in living cells has a conductive tip 90-nm high (show in inset) made of titanium and platinum with an insulating layer of silicon nitride and silicon oxide. A SNOM image shows antirabbit IgG, an3 antibody used as reagent, that has been labeled with a flourophor (between arrows). The spot has...
• U.S. and International Fuel Cell Patents - NOVEMBER 2002 FCT - 7MS.com
  (20020903), Process for making and using titanium oxide particles, Ying Wang and Donald Keith Swanson, E. I. du Pont de Nemours and Co. U.S. 6,444,337 (20020903), Fuel cell with low cathodic polarization and high power density, Subramanian T. M. Iyer, Energetics, Inc. U.S. 6,444,338 (20020903), Fuel...
• Fuel-cell APUs: A Step Toward All-Electric Cars
  interface, lowering cell efficiency. But the addition of such ingredients as lanthan, manganese, and titanium, let the alloy "self-seal" at high temperatures. Here, a protective layer of electrically conductive chrome manganous oxide grows on the surface of the interconnectors and helps prevent chrome...
• Treating wastewater from CMP using ultrafiltration
  in Figure 1, silica particles in an oxide slurry can range in size from 20 to 80 nm, far too small to be retained by microfilters alone. To be effective, cross-flow microfilters need to build up a dynamic layer, similar to a filter precoat. Achieving this buildup frequently requires the addition...
• MICRO:March 1998:Product Technology News (p.122)
  The ViPRR variable-input pneumatic retaining ring produces uniformity to within 3 mm of the wafer's edge. For use on the company's Symphony-CMP and Model 6DS-SP CMP tools, the carrier can be employed for advanced planarization applications to 0.18 um. It is made of corrosion-resistant titanium...
• MICRO:Top 30 (November/December 2001)
  steps can be run on this tool. The unit is suitable for multistep metal and oxide CMP, and provides end-point detection and closed-loop control. The unit is controlled via a PC with a touch screen monitor. The PC runs on Windows NT with an Ethernet interface. Wafer Sorter. MGI Electronics. Tempe, AZ...
• Tantalum Biocompatability Report (.pdf)
  , then slight discolouration has been noted on some occasions. This is similar to the. situation which occurs with titanium and titanium alloys, and is possible secondary to the removal. of oxide particulates. Intake of tantalum and tantalum oxide produces very low levels of tantalum. absorption from...
• Product Technology News
  instrument. A heated Teflon spray chamber and membrane removes the solvent before introduction into the plasma. In addition to reducing oxide interferences in ICP-MS, the mechanism improves detection limits for iron, calcium, and potassium while maintaining performance for elements such as arsenic...

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