Tool Detecting Equipment System Vendor

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• MICRO:Process Equipment Furnaces by Mark Yelverton, p.27 (April '99)
  to be calibrated by first centering the flow of the MFM through an MFC in which the actual flow has already been checked, and then flowing the small-flow MFC through the MFM. Using the center of the MFM increases the accuracy of the checking process for detecting change over time using the AFD system...
• MICRO:April 98:Industry Lead Story
  and photolithography analysis. Its Surfscan AIT system is a film and pattern tool. The vendor has introduced a laser imaging pattern wafer inspection system called the ILM-2230, which the company says is the first to combine oblique angle darkfield illumination with KLA-Tencor's small-pixel, high-data-range image...
• MICRO:Industry News:'Round the Circuit (Jan '99)
  of its facilities in Israel. The vendor is using its WF-73X technology to detect a range of yield-killing defects. The system takes laser light scattered from the illuminated surface features, collects it through multiple detectors, and feeds the information into a signal processor for image...
• MICRO: Archive: Back Issue TOC
  forms materials unit; Oxford gets Thermo VG; Edlon inks plastics pact with 3P Meeting process and equipment challenges in MEMS deep silicon-etch processes Photomask cleaning tool, wafer transfer/loadlock system, cordless vacuum wafer wand, enclosed adjustable-speed drives, pressure regulator...
• MICRO: Archive: Back Issue TOC
  /Yield Analysis, Metrology: Detecting resistive shorts and opens using voltage contrast inspection PRODUCT TECHNOLOGY NEWS Products: Metal thin-film metrology tool, all-digital pressure transducers, butterfly valve, photolithography mask aligners, DRIE ICP system, polysilicon furnaceware...
• MICRO:June 98:Viewpoint (p.41)
  defects can be detected with relatively large pixel sizes using a high-speed inspection system at relatively low cost. The use of several of these specialized inspection tools, coupled with high-sensitivity sampled inspections, should provide tremendous leverage for improving yields more quickly...
• Mind Over Metal: Master Impurities
  for detecting metallic particles have been joined of late by x-rays, with emerging technologies (MRI and ultrasound, for example) on the horizon. For now, single- or multiple-coil electromagnetic detectors predominate. Though detector technology is mature, sensitivities have improved, with most detectors...
• MCM : A New Technology in Predictive Maintenance
  Analysis. Fleet Management. Job Request System. Maintenance Audit. On-the-job software. Other. RCM/FMEA. Safety/Lockout/Tagout/Environmental. Shutdown Management. Spare Parts Analysis. Tool Control. Searchable Software Database. Free Software Downloads. by Package Name. by Software Type...
• MICRO: Product Extras (September 2000)
  with a detection capability in the range below parts per billion, a particle counter with autoflow chemical sampler, and a microwave digestion/sample preparation system for detecting ultratrace contamination levels. The supplier is conducting the tests on EastaPure PM acetate, EastaPure MPK, EastaPure MAK...
• Examining the Processes of RCM and TPM
  ). Condition Monitoring. Failure Analysis. Fleet Management. Job Request System. Maintenance Audit. On-the-job software. Other. RCM/FMEA. Safety/Lockout/Tagout/Environmental. Shutdown Management. Spare Parts Analysis. Tool Control. Searchable Software Database. Free Software Downloads. by Package Name...

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