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Made for use with sub-0.25- um processes, the SEMVision in-line microscope automatically classifies up to 300 defects per hour. The system uses a proprietary technology to provide enhanced topographic information and automatic classification of defects into types closely linked to their source...

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Lapmaster International
Micro-Epsilon Group
Radiant Vision Systems
Intrinsic Crystal Technology Co., Ltd. (ICC)
Intrinsic Crystal Technology Co., Ltd. (ICC)