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MICRO: Rudolph, SCP
and etches. HONORS: The WaferView 320 system is part of Rudolph's macrodefect inspection suite for critical litho and CMP steps. PHOTO COURTESY OF RUDOLPH TECHNOLOGIES Rudolph's product has three constituent parts: the I-MOD inspection modules, which are designed to be integrated with track or polishing
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MICRO: Advanced Process
statistical rules that can track tool performance and detect fault conditions in real time. This technique can be used to analyze data in univariate or multivariate modes, in which. MICRO: Advanced Process. MICRO Advertiser and Product Information Buyers Guide. Chip Shots blog. Greatest Hits
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Chemical Switch Cuts Costs, Improves Safety (.pdf)
approximately 28 ment curb. But a heavily used railroad track was. packed-bed NOx scrubber. "A number of factors man-hours, as well as the purchase and disposal just feet away and a derailment could pose an. led us to begin looking for a less labor intensive of five drums of hydrochloric acid. extreme
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MICRO: APC/AEC
is used to track the variation associated with each model parameter for the given lot context. Discussion of the properties of the EWMA observer is found in the literature.3 The EWMA observer for B1 is described in the following equation (the EWMA observer for B2 has the same form): B1(k+1) = B1(k
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MICRO: Rebuilding Copperopolis - Biolsi (July 2000)
and Defects. It has been estimated that up to 80% of the yield loss in a mature, high-volume fab is a result of random particle and pattern defects.7 This has prompted yield engineers to create in-house yield management systems that track defect data. These systems typically involve data collection from
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MICRO: Products
transfer. Benefits of the new system include higher throughput, a smaller footprint, and greater process flexibility than previous-generation units. It also includes the Advanced Navigation System, which can track a wafer in real time and ensure high wafer-placement accuracy. In addition to offering
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MICRO:Industry News:Order Desk (Oct '99)
Strasbaugh to use Asyst tool Strasbaugh, a San Luis Obispo, CA based manufacturer of CMP equipment, has bought several wafer-handling robots and linear wafer track systems from Asyst Technologies. The company will integrate the robots in its 200-mm Symphony system. The order includes Asyst's
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MICRO:Industry News:Lead (Feb 99)
and control (PDC) group and state-of-the-art electrical characterization tools. A lithography cell occupies nearby Building 89, which is a converted office space. An ASML 5500/90 DUV stepper and DNS 80B track are the main occupants, with a wafer particle inspection tool, an overlay registration