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  • Controlling wafer transport in a vacuum environment
    to a profitable return on assets. Nonproductive downtime caused by tool failure or malfunction has a substantial impact on the bottom line. With a minimum of 4 hours to pump down to vacuum after a failure or malfunction, an extraordinary loss of revenue occurs. Considering the fact that large fabs have up
  • Monitoring Flammable Gases and Vapors in Sewage Lines and Treatment Facilities
    Publicly owned treatment works (POTWs) collect wastewater from municipal, commercial and industrial facilities, transport it through a series of contributor pipes, known as a collection system, and deliver it to the treatment plant. Regulations prohibit these facilities from discharging flammable
  • Working in a vacuum
    in a vacuum. This mode of operation is now seen as a means of preventing the transport of contaminating particles between process chambers. Moreover, keeping large parts of a fab line in a vacuum eliminates the time spent pumping down individual process chambers to the required vacuum levels
  • MICRO: Product In Action II (July '2000)
    material handling systems (AMHSs) that transport wafers through the manufacturing lines of Intel, Motorola, and other global semiconductor giants. As a supplier of advanced factory automation systems, PRI has succeeded partly by discovering how rapidly transport vehicles ought to travel in order
  • Converged Optical Ethernet - MultiService over SDH Application (.pdf)
    Most service providers have existing SDH networks that have proven indispensable in serving revenue-critical TDM-based private line services. SDH is firmly established as the technology of choice for general-purpose transport in telecom networks because of its flexibility, reliability, ease
  • Optical Switching - Preface
    and wavelength routing. Optical burst switching (OBS) attempts to address. the shortcomings of both techniques by suggesting data transmission without bandwidth. reservation (for reduced end-to-end latency) and a basic transport unit with an. intermediate granularity (that falls between wavelength
  • MICRO: Expansions and Acquisitions
    Entegris has purchased the wafer- and reticle-carrier product lines of Asyst Technologies for $38.75 million. The purchase includes all intellectual property related to the products. Based in Chaska, MN, Entegris provides protection and transport products and services. Asyst, which is headquartered
  • MICRO:Product Technology News (March 2001)
    , with an added double-sided cleaning system. Prediffusion cleans can be performed with less chemistry and improved end uniformity with the double-sided system. Because the wafers remain untouched during transport, redeposition and cross-contamination are eliminated. Compared with other single-wafer

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