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  • RF Wafer Testing: An Acute Need, and Now Practical (.pdf)
    automated. measurements. This means that a robot delivers the wafer, the calibration standard, and. the probe card to where they are needed. In other words, a major test system design goal. is absolute data integrity without human intervention. If intervention is required, it should. be accomplished
  • Next Big Challenge for PV Makers: Wafer Handling
    to wafer transfer boats, " he says. One factor that is complicating the task of handling solar-cell material is a trend toward thinner silicon wafers. Raw silicon has been expensive and in short supply. So there is an incentive to use as little as possible. This has led the industry to find ways
  • Robots That Teach Themselves
    A "feel your way around " strategy can let robot arms learn their surroundings. Robots on production lines must be taught where to move. That is true in spades for robots that move silicon wafers in semiconductor manufacturing. Wafer-handling robots are carefully taught each location from which
  • SmartMoves TM Spotlights: Brooks Automation
    to. reliably maintain precise con-. trol during wafer production. Brooks has used Galil. time after time. motion controllers in every. By this constant adher-. ence to excellence in design,. one of the over 10,000. manufacturing and, above all,. wafer handling robots. quality components, Brooks. they’ve
    Silicon wafer manufacturer Mitsubishi has ordered $4.5 million worth of automation systems from PRI Automation in Billerica, MA. The gear includes an AeroTrak overhead monorail system, machine-loading robot vehicles, and loading robots for inter- and intrabay transport and storage of 150
  • Absolutely accurate
    . Wafer-handling Scara robots are going to direct-drive configurations to meet the performance demands of modern fabs. The semiconductor industry is beginning to realize it has a good opportunity to drive down its equipment costs. The opportunity concerns the hundreds of Selective Compliant Assembly Robot Arms
  • MICRO:Industry News:Order Desk (Oct '99)
    Strasbaugh to use Asyst tool Strasbaugh, a San Luis Obispo, CA based manufacturer of CMP equipment, has bought several wafer-handling robots and linear wafer track systems from Asyst Technologies. The company will integrate the robots in its 200-mm Symphony system. The order includes Asyst's
  • MICRO: Tool/Fab Support Strategies
    Patrick Conarro, Peter Frost, and Gordon Beckhart, Brooks Automation oday's 300-mm wafer fabs depend on automation. Throughput and cycle-time requirements demand the speed and precision of robots and lot movement systems, while contamination concerns dictate that the presence of people in the fab

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