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  • MICRO:Product Technology News (Oct. '98, p.110)
    to ensure a fresh mix to +-1% accuracy, while the dispensing module uses pressurized wet N to deliver slurry to the tools without pulsation. A control module features a touch screen operator interface and single-point utility connections. The MTBF rate is >3000 hours. The SpectraLASER UTF
  • MICRO: Thermal Processing
    batch furnaces may generate particles that require a postcure wet-cleaning step to remove. In addition, the long process cycle and large batch size associated with batch furnaces adds queuing problems for small production lots. To address such challenges, a novel siloxane-based organic spin-on-glass
  • Wood you believe bearings?
    , or higher in certain wet conditions. Wetness swells the close-grained wood at a slight and predictable rate so bearings can be sized for submerged and washdown service.
  • MICRO: Products
    and an extensive library of calibrations and methods are available for a variety of tool-effluent matrices from chemical vapor deposition (CVD) chamber cleans to copper CVD depositions. Dual gas systems enable the simultaneous assessment of inlet and outlet streams from wet scrubbers, point-of-use

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