of
XRF excitation sources with optics and are optimized to provide high brightness in small spots for a variety of thin film
applications. With its own x-ray optics business, Rigaku is well-positioned develop and manufacture X-ray sources for current and future market needs.
Applications. Micro-XRR: film thickness, density, and roughness measurement. Micro-
XRF: film thickness and composition measurement. Micro-XRD: phase, crystallinity, and preferred orientation evaluation. Thickness measurement...
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