Thin Film Equipment Information Thin film equipment is vacuum process equipment for the deposition or modification of thin films or surfaces using CVD, PVD, plasma etching, and thermal oxidation or ion implantation.  Thin film equipment is widely applied in the semiconductor or wafer processing, cutting tool coating and optical films. Coating Systems Types of Thin Film Equipment Coating systems types of thin film equipment are batch systems (single chamber or multiple wafers), cluster...
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Q & A on Thin Film Equipment

We asked our users for their input on Thin Film Equipment. Here are the results of 56 users familiar with Thin Film Equipment.

Who Took Our Poll? | Design Trends | Applications and Use | Features | Buying Advice

Who Took Our Poll?Top

Design TrendsTop

Q:
What new technologies are influencing thin film equipment design?
10 answers
Answers:
Novel thin film material technology, such as carbon nanotube, metallic nanowire, graphene, etc.; LED and OLED technology; touch screen and display technology; fiber optical communication technology; photovoltaic technology; semiconductor integrated circuits technology (VLSI, ULSI, WSI, SOC, 3D-IC, etc.); GMR (multilayer GMR, spin valve GMR) technology.....
~FANG L, Sr Staff Engineer, Northfield, MN
Requirement for low temperature deposition processes e.g. PEALD, PEMOCVD Wide band gap materials applications Lower cost epitaxial processes e.g. HVPE
~Frazer Anderson, Business Director, Yatton, UK
Pulse Power Supply for Cathodes (Magnetron Sputtering), additional plasma source and droplet-free Arc deposition
~Loganathan S, Research & Development, Bangalore, India
Large area uniform coatings
~Sushil Kumar, Research & Development, New Delhi, India
Sources, Layer structures
~James L, Manufacturer, Shenzhen, China
Cadmium free technologies
~Joachim M, CEo /Owner, Geisingen, Germany
Nanotechnology
~Saad Hamzaoui, Faculty/Staff, Oran, Algeria
Steel making
~Purchaser, Dongguan City, China
Generator
~Perawut Chin, Process Engineer, Klong nung, Thailand
MOCVD
~Technical Support/Services, Singapore, Singapore

Q:
From your perspective, which companies are creating the most innovative thin film equipment?
8 answers
Answers:
There are several Chinese sources available for decorative coating applications. Hauzer Technocoating is well known for Tribological and other functional coatings.
~Loganathan S, Research & Development, Bangalore, India
Applied materials, VEECO, Yasui Seiki, VON ARDENNE, Leybold, ....
~FANG L, Sr Staff Engineer, Northfield, MN
Dongguan Zhongyuan Special steel Limited
~Purchaser, Dongguan City, China
Applied Materials USA
~Sushil Kumar, Research & Development, New Delhi, India
Oxford Instruments
~Frazer Anderson, Business Director, Yatton, UK
Lotus Systems
~Joachim M, CEo /Owner, Geisingen, Germany
Leybold
~Perawut Chin, Process Engineer, Klong nung, Thailand
Veeco
~Technical Support/Services, Singapore, Singapore

Applications and UseTop

Q:
What are some of the applications you have used thin film equipment for?
14 answers
Answers:
Developing novel materials, particular composition materials; fiber optical communication used thin film filters (GFF, DWDM, tunable, etc.,); roll-to-roll index matched ITO coated PET for projected capacitive touch panel application; multilayer coatings for aerospace thermal control application.
~FANG L, Sr Staff Engineer, Northfield, MN
I used thin film equipments for deposition of silicon and carbon based thin films for photovoltaic and tribology applications.
~Sushil Kumar, Research & Development, New Delhi, India
Thin film analysis and metrology Thin film magnetic heads - inc. GMR HBLED, PV, MEMS Several III-V materials applications
~Frazer Anderson, Business Director, Yatton, UK
For industrial applications like decorative applications, tribological applications and optical applications.
~Loganathan S, Research & Development, Bangalore, India
Thin film thickness measurement , thin film deposition like CVD,PECVD, Sputtering
~Virendar Kumar, Technical Support, Delhi, India
Air bearing surface (ABS) design on the Slider as part of the hard disk drive.
~Technical Support/Services, Singapore, Singapore
Thin film deposition TCO by sputtering solar cells evaporation
~Saad Hamzaoui, Faculty/Staff, Oran, Algeria
Dielectric thin films deposition and capacitor applications.
~Research & Development, Yasu, Shiga Japa, Japan
Display, Optics, Window film, Solar film
~James L, Manufacturer, Shenzhen, China
Steel, mold making, casting
~Purchaser, Dongguan City, China
Large area glass coating
~Research & Development, Kraków, Poland
Evaporation
~Engineering, Design, Menges, Slovenia
Solar cell
~Perawut Chin, Process Engineer, Klong nung, Thailand
CIS CIGS
~Joachim M, CEo /Owner, Geisingen, Germany

Q:
Please share with us any “non-standard” applications that thin film equipment has been used for.
4 answers
Answers:
Equipments for steel ball bearing coatings
~Sushil Kumar, Research & Development, New Delhi, India
Wafer fab. Slider fab.
~Technical Support/Services, Singapore, Singapore
Powder manufacturing
~James L, Manufacturer, Shenzhen, China
Steel, old making
~Purchaser, Dongguan City, China

Q:
Do you know of any disastrous mistakes that occurred due to the incorrect usage of thin film equipment?
1 answers
Answers:
Without putting vacuum pumps (process pumps) on standby mode heavy load of gas/gases used before the start of the processing of materials.
~Sushil Kumar, Research & Development, New Delhi, India

FeaturesTop

Q:
What would your design or feature "wish list" be for this product?
6 answers
Answers:
Additional Plasma source to improve ionization level during deposition. Droplet-free Arc coating with high degree of adhesion. Cryo pump for pumping out moisture.
~Loganathan S, Research & Development, Bangalore, India
Large area plasma enhanced chemical vapor deposition system using higher operating frequencies.
~Sushil Kumar, Research & Development, New Delhi, India
Combination coating technology equipment with process monitor and control.
~FANG L, Sr Staff Engineer, Northfield, MN
Advanced design
~Purchaser, Dongguan City, China
Cadmium Free
~Joachim M, CEo /Owner, Geisingen, Germany
Solar panel
~Technical Support/Services, Singapore, Singapore

Q:
Is there any advice you want to share with users to help them avoid common errors in selection or usage of thin film equipment?
5 answers
Answers:
As well as the answer to Q8, the up front capital cost of any complex equipment is usually, in the long term, only a small part of the overall cost. Look at running costs and the level of support a company can give, both service and technical / process support. Also try and talk to existing users, not just those the company gives as references to get a view of the quality of support.
~Frazer Anderson, Business Director, Yatton, UK
Usually people make errors in choice of size of chamber without proper consideration of deposition area of sample.
~Sushil Kumar, Research & Development, New Delhi, India
Discussion with experts in this field will help us to zero-in on the right equipment.
~Loganathan S, Research & Development, Bangalore, India
Please have a look on your energy usage for the tool means CoO
~Joachim M, CEo /Owner, Geisingen, Germany
Search in the website for new technical
~Purchaser, Dongguan City, China

Buying AdviceTop

Q:
Do you have any advice for people relative to buying or using thin film equipment?
8 answers
Answers:
Ensure you have a clear definition of what you are trying to achieve and if possible prioritize your requirements. The purchase of almost any capital equipment involves compromise, know what you can and what you cannot compromise on before analyzing the tender documents.
~Frazer Anderson, Business Director, Yatton, UK
Understand thin film materials you are going to fabricate and their applications, including the application technology evolution first, do cost/benefit analysis before making the decision.
~FANG L, Sr Staff Engineer, Northfield, MN
Selection of equipment with correct configuration is the most important activity.
~Loganathan S, Research & Development, Bangalore, India
In sputtering the rf power supply should be strong.
~Saad Hamzaoui, Faculty/Staff, Oran, Algeria
Have to look on the total cost of ownership.
~Joachim M, CEo /Owner, Geisingen, Germany
Pls study by yourself and from specialist.
~James L, Manufacturer, Shenzhen, China
Search in the website for new technical.
~Purchaser, Dongguan City, China
Should be application specific.
~Sushil Kumar, Research & Development, New Delhi, India


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