Plasma Generators Information

Show all Plasma Generators Manufacturers

Plasma generators are special generators that produce the needed RF power to ignite and maintain plasma in plasma chambers and similar devices. High-frequency RF fields, typically emitting around 13.56 MHz, are used to generate capacitively coupled plasma (CCP) or wave-heated plasma, which is then used in various integrated circuit (IC) manufacturing processes such as etching and plasma-enhanced chemical vapor deposition (PECVP). Important plasma generator specifications include power, accuracy, and frequency stability.

 

plasma generators selection guide

A typical plasma generator.

Image credit: MKS Instruments