Lithography equipment transfers circuit or device patterns onto a substrate using a patterned mask and a beam of light or electrons to selectively expose a photoresist layer. Overlay metrology systems align the pattern masks or reticules.
SUSS MicroTec Group is a supplier of equipment and process solutions for microstructuring applications with more than sixty years of engineering experience. The solution portfolio covers all performance relevant steps for wafer processing ranging from coating, baking, developing and... (more)
SUSS MicroTec Precision Photomask 821 San Antonio Road, Palo Alto, CA
SUSS MicroTec Inc. 430 Indio Way, Sunnyvale, CA