The MKS 627C/628C e-Baratron® Capacitance Manometers are specially designed for networking with Ethernet communications devices for real-time diagnostics. The new all-digital pressure manometers incorporate MKS' well-known Baratron capacitance technology to deliver highly accurate, reliable, stable pressure measurements to many critical manufacturing processes.

Now equipped with Ethernet communications, the new e-Baratron manometer enables diagnostics on a real-time basis during processing, allowing users to quickly and easily perform system analysis and troubleshooting, significantly improving system uptime and process repeatability.

The advanced manometer can be either digitally networked or used as a stand-alone vacuum monitor in virtually any process or application. An embedded Internet web browser provides communications with a Windows®-based PC. With a rapid datalogger (100 msec), the 627C/628C e-Baratron manometer performs quick, detailed self-diagnostics and simplifies the troubleshooting of other system components.

Models can be heated to either 45°C or 100°C for use in harsh semiconductor and display manufacturing, as well as biopharmaceutical processes. Accuracy is better than 0.10% of Reading, while full scale ranges from 1000 to 0.02 Torr give the e-Baratron manometer the widest application range of any capacitance manometer on the market. Its standard all-metal, all-welded pressure sensor has exceptional corrosion resistance from aggressive process gases. Additionally, the manometer incorporates an MKS patented particle sump to prevent process by-products from condensing on the diaphragm and causing drift.

The Vacuum Research Diaphragm Manometers are compact vacuum measurement and control instruments that are unaffected by gas composition. The diaphragm is 316L stainless steel and can measure liquid or gas under vacuum.

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Response time is less than 1 second for full scale and instruments are available with a variety of flanges including VCR and CF, NPT or NW styles.

All models of the Diaphragm Manometer provide simulaneous linear outputs of 0 - 10 VDC and 4-20 mA. To improve the resolution of your PLC or data system the 4-20 mA signal can be changed in the field to have spans of either 0 to 1, 0 to 5, 0 to 10, 0 to 50 or 0 to 1000 Torr. 4 mA is always "zero" pressure but by moving a pin jumper on the circuit board 20 mA can be 1, 5, 10, 50 or 1000 Torr.

The Dual Set Point Controller option provides set point values adjusted from the front panel and displayed on the meter. Push-to-set switches simplify display of the set point vacuum. Because it is often helpful to display the vacuum reading in more than one place or to have the diaphragm sensor at a distance from the control room or operators console we offer slave displays. These displays do not have a diaphragm sensor but are accessories to the manometers and can be used with the transmitter, indicator or controller models. The slave is built in a standard 1/4 DIN enclosure for panel mounting and is connected to the manometers with up to 500 ft. (150 m) of 4 conductor cable. The slave is powered with 115/230V, 50/60 Hz and provides 24 VDC to power the manometer. The 4-20 mA signal from the manometer is displayed on the slave in Torr or mbar.

Features:

• 20 milliTorr To 1000 Torr Standard Range
• 316L S.S. Diaphragm Measures Gas Or Liquid
• Select Transmitter, Indicator or Controller
• All 3 Styles Have 0-10 V Plus 4-20 mA Outputs
• Easy To Use; No Keyboards or Scrolling Menus
• Fast Response; Less Than 1 Second Full Scale
• All Popular Flanges Available; NW, VCR, CF

Specifications:

• Standard Range: 0.02 to 1000 Torr
• Optional Range: 0.02 to 1300 mbar
• Display: 4 digit green LED; characters 0.56 in. (15 mm) high.
• Calibration: Any gas, liquid or vacuum compatible with sensor materials.
• Response Time: For increase in pressure less than 1 second. For decrease in pressure below 100 mTorr less than 10 seconds.
• Analog Outputs: 2 simultaneous linear signals

• 0 to 10 Volt DC, linear, for 0 to 1000 Torr (1mv=100 mTorr)
• 4-20 mA. 4mA is always high vacuum ("zero" pressure). But 20 mA can be jumper selected by the user to be 1, 5, 10, 50 or 1000 Torr. Shipped with jumper in 1000 Torr position unless otherwise requested.
• Optional Set Points: SPDT (Form C) max current: 250 mA. Maximum power 350mw, Maximum voltage: 250 V AC/DC.
• Set Point Range: Full range of instrument. 20 mT to 1,000 Torr
• Materials: Diaphragm is 316L Stainless Steel. Other parts in contact with the process are 300 Series Stainless.
• Power: Any voltage from +15 to +35 VDC unreg; Less than 250 mA.
• Wattage: Less than 1 Watt for indicator; 2 Watts with set points.
• Connector: 15 pin DB 15
• Temperature Effects: When changes occur in ambient temperature between 0 oC and 50 oC, reading will change no more than ±0.02% per oC.
• Bakeout Temperature: Instrument can be baked to 100 oC (212 oF) in air or vacuum.
• Weight: Net : 0.75 lbs. (0.34 kg) Ship: 1.5 lbs. (0.68 kg)
• Maximum Pressure: Pressure in excess of 1,000 Torr (5 psig) may damage the diaphragm.

Please click on the links to the right, request a quote or contact Vacuum Research today for more information.

The Type 631B high temperature Baratron® capacitance manometer is a compact and low current solution for pressure measurement in difficult semiconductor and biopharmaceutical applications where condensable by-products exist. It operates at 150°C or 200°C and significantly reduces by-product related drift in the pressure range from 1 to 1000 Torr.

The 631B is the latest development in the series of high temperature capacitance manometers MKS introduced over 10 years ago. It features an ultra-compact design that reduces the installation envelope by at least 40%, making it very easy to design into new space-constrained process tools. Drawing less than 1.0 Amp current in normal operation (50% less than existing manometers), the 631B's self-contained electronics require only ± 15 VDC input power, reducing the onboard power supply costs. In addition, its performance is improved due to the elimination of noise-generating interconnecting cables. The all-Inconel® capacitance sensor provides superior protection against corrosive process environments, and the high (45 psia) overpressure rating ensures excellent repeatability and system stability, regardless of process conditions.

The 631B is applicable in the most demanding vacuum processes in semiconductor manufacturing, such as metal etch and nitride chemical vapor deposition. It is also ideal for use in biopharmaceutical processing equipment such as lyophilizers and sterilizers that use steam to prevent bacterial growth.

The Vacuum Research Diaphragm Manometers are compact vacuum measurement and control instruments that are unaffected by gas composition. The sensors have 316 L stainless steel diaphragms and any sensor can measure liquid or gas pressure as well as vacuum.

• View Detailed Datasheet

Response time is less than 400 milliseconds for full scale and sensors are available with a variety of flanges including VCR and KF or NW styles. With any sensor, these instruments offer the precision and high resolution of digital electronics at the same price as analog instruments. Both indicator and controllers are provided in 1/4 DIN enclosures.

The Dual Set Point Controller operates two control relays. Set point values are adjusted from the front panel and displayed on the meter. Push-to-set switches simplify display of the set point pressures. Relays have 3 Amp contacts, SPDT, and have screw terminal connectors on the rear of the instruments.

Features:

• 0.5 to 1200.0 Torr Range; ± 0.1 Torr Resolution
• Available 0.5 to 1600.0 mbar & 0.1 to 160.00 kPa
• 316 S.S. Diaphragm Measures Gas Or Liquid
• Dual Set Point Controller With 2 Relays
• Easy To Use; No Keyboards or Scrolling Menus
• Linear 0 to 10 VDC Output; 4-20 mA Optional
• Fast Response; Less Than 400 mSec. Full Scale

Specifications:

• Pressure Range: 0.5 to 1200 Torr; ± 0.1 Torr
• Resolution: ± 0.1 Torr over entire range.
• Display: 4 1/2 digit red LED; characters .47 in. (12 mm) high.
• Calibration: Any gas, liquid or vacuum compatible with sensor materials.
• Accuracy: 1% of reading or 1 Torr.
• Response Time: Less than 400 msec. for response to a step change.
• Linearity: ± 0.15% Full Scale. Sensitivity: ± 0.1 Torr
• Analog Output: 0 to 10 Volt DC into 2000 Ohm load or higher. 2 pin connector included. 4 to 20 mA output in addition to 0 to 10 Volt D.C. available.
• Sensor: See "ordering Information" below for list of sensor heads.
• Materials: All parts in contact with process are 316 L Stainless Steel.
• Set Point Range: Full Scale, 0.5 to 1200 Torr. Repeatability: ± 1 Torr.
• Relays: Controller model includes 2 relays; SPDT contacts rated 3A @ up to 220 VAC non-inductive.
• Sensor Internal Volume: 1.25 ml for stainless steel sensor.
• Line Power: 115 VAC, 50/60 Hz; 230 VAC or 24 VDC optional at no additional cost.
• Wattage: Less than 1 Watt for indicator; 2 Watts for controller.
• Line Regulation: ± 20% change in line voltage produces less than 1% change in reading.
• Temperature Effects: When changes occur in ambient temperature between 0 oC and 50 oC, reading will change no more than ±0.02% per oC.
• Bakeout Temperature: Sensor can be baked to 100 oC (212 oF) in air or vacuum.
• Dimensions: 1/4 DIN enclosure. See drawing on page 44.
• Mounting: Panel mounting hardware is standard. Bench mount and portable cabinets are also available, see page 43.
• Sensor Cables: 10 ft. (3m) attached.
• Extension Cables: Change sensor cable length without recalibration. Extensions to 250 ft. (75 m) can be used. See page 42.
• Line Cord: 3 wire, 65 inch (170 cm) attached.
• Net Weight: Indicator 1 lb., 2 oz. (0.5 kg); Controller 1 lb., 6 oz. (0.6 kg)
• Shipping Wt.: Indicator 2 lbs., 8 oz. (1.1 kg); Controller: 3 lbs. (1.3 kg)

Please click on the links to the right for more information, request a quote or contact Vacuum Research today!

The Vacuum Research Diaphragm Manometers are compact vacuum measurement and control instruments. The sensors are available with either 316 SS or pure silicon diaphragms and any sensor can measure liquid or gas pressure as well as vacuum.

• View Detailed Datasheet

Response time is less than 400 milliseconds for full scale and sensors are available with a variety of flanges including 15 mm, VCR, and KF-16. With any sensor, these instruments offer the precision and high resolution of digital electronics at the same price as analog instruments. Both indicator and controllers are provided in 1/4 DIN or standard cylindrical enclosures.

The Dual Set Point Controller operates two control relays. Set point values are adjusted from the front panel and displayed on the meter. Push-to-set switches simplify display of the set point pressures. Relays have 3 Amp contacts, SPDT, and have screw terminal connectors on the rear of the instruments.

For applications that require maximum resolution a special display unit is available with a 4 1/2 place LED display. To specify this feature add to the part number "HI-RES" suffix and add $192.00 to the price.

Features:

• 1 to 1500 Torr Range; ± 1 Torr Resolution
• ± 0.1 Torr Resolution Available as Option
• Available in 1 to 2000 mbar & 0.1 to 200 kPa
• 316 S.S. Diaphragm Measures Gas Or Liquid
• Dual Set Point Controller With 2 Relays
• Easy To Read Large Backlit Digital Display
• Linear 0 to 1.5 VDC Output; 4-20 mA Optional
• Fast Response; Less Than 400 mSec. Full Scale

Specifications:

• Pressure Range: 1 to 1500 Torr; ± 1 Torr (± 0.1 Torr optional).
• Calibration: Any gas, liquid or vacuum compatible with sensor materials.
• Accuracy: 1% of reading or 2 Torr.
• Response Time: Less than 400 msec. for response to a step change.
• Linearity: ± 0.15% Full Scale. Sensitivity: ± 1 Torr.
• Analog Output: 0 to 1.500 Volt into 2000 Ohm load or higher. 2 pin connector included. 4 to 20 mA and 0 to 10 VDC output in addition to 0 to 1.500 Volt D.C. available for instruments in 1/4 DIN enclosure.
• Transducer: See "ordering Information" below for list of transducers.
• Materials: All parts in contact with process are 316 or 304 SS, or silicon.
• Set Point Range: Full Scale, 1 to 1500 Torr. Repeatability: ± 2 Torr.
• Sensor Internal Volume: 1.25 ml for SS; 0.5 ml for Silicon.
• Line Regulation: ± 20% change in line voltage produces less than 1% change in reading.
• Line Power: 115 VAC, 50/60 Hz; 230 VAC optional at no additional cost.
• Wattage: Less than 1 Watt for indicator; 2 Watts for controller.
• Temperature Effects: When changes occur in ambient temperature between 0 oC and 50 oC, reading will change no more than ±0.02% per oC.
• Bakeout Temperature: Gauge tube can be baked to 100 oC (212 oF) in air or vacuum.
• Dimensions: DIN enclosure: 92X92 mm panel cutout, 122 mm F to B.
• Standard enclosure: 2.75 in. diameter panel cutout, 4.8 in. F to B.
• Mounting: Panel mounting hardware is standard. Bench mount and portable cabinets are also available, see page 43.
• Transducer Cables: 10 ft. (3m) attached.
• Extension Cables: Change sensor cable length without recalibration. Extensions to 500 ft. (150m) can be used. See page 42.
• Line Cord: 3 wire, 65 inch (170 cm) attached.
• Net Weight: Indicator 1 lb., 2 oz. (0.5 kg); Controller 1 lb., 6 oz. (0.6 kg)
• Shipping Wt.: Indicator 2 lbs., 8 oz. (1.1 kg); Controller: 3 lbs. (1.3 kg)

Please click on the links to the right, request a quote or contact Vacuum Research today for more information.

Ideal for measuring low differential pressure in clean rooms, test and
balance, medical equipment, HVAC, pneumatic systems and computer peripherals. Portable, and weighing only 5 oz (150 g) including the battery, these meters are convenient for use in the lab, field or factory. Five models are available covering a wide range. All
read gauge, and differential pressure in up to 11 units of measure and feature large backlight display, max-min, hold, and auto power off functions. The RS232 port enables communication with a computer. High accuracy of ±0.3% fs at 25ºC, repeatability: ±0.2% (max ±0.5%) FSO, and combined linearity and hysteresis: ±0.2 (Max ±1.0%) FSO. All Sper Scientific Manometers come ready to use with connection hose, instructions, and a 9V battery, in a hard shell carrying case.
Dim: 71/8" x 23/4" x 1"
(182 x 72 x 30mm).

OPTIONAL ACCESSORIES

840027 AC Adapter
840052 Software
840054 RS232 75" Cable
840089 Rubber Holster
840090 Water Resistant Instrument Pouch
840094 USB Cable