Improve yield with non-contact control of your FPD glass handling, especially for critical processes. The more control you have, the more efficacious your processes. Further, every time your glass touches down, your yield goes down, too. So whether you're using wheels, rollers, or even air bars, frequent contact during glass handling is destroying your productivity.

But you don't have to let your glass 'ground.' Replace your existing specification with New Way Precision Chucks. With New Way's Porous Media technology, air pressure issues from millions of sub-micron sized holes across the entire bearing surface, virtually eliminating contact for even Gen 9 or Gen 10 glass.

Further, vacuum pre-load helps to control the glass, holding it precisely for AOI, direct-write lithography, probing, repair, and any number of other applications. This combination of air and vacuum is also ideal for non-contact conveyance between processes, even at high speeds (2m/sec). Not only does this level of control give you significant throughput improvement, it also enables you to move offline inspection on-line, preventing serial defects and even more yield degradation.

For non-contact control of FPD glass under or near precision processing applications, New Way® introduced a Porous Media Precision Chuck. This chuck provides a much higher level of precision, stiffness, and damping than traditional air conveyors.

Our Porous Media Precision Chucks are designed so that, with air pressure on, the flow through a vacuum hole is the same whether there is glass over it or not. As simple as this solution is, it also offers a number of additional advantages. For example, as the glass moves on, over and off of the chuck, the vacuum pressures and air gaps remain the same.

The net result is that by moving the glass over an array of New Way® Precision Chucks, large, costly, substrate-sized vacuum chucks can eliminated. Further, the high pressure air exiting the gap prevents back-side damage to the glass or contamination by the bearing surface.

New Way's modular air bearing components are robust and easy-to-use in scalable arrays. Yes, they do cost more…but imagine what you'll make up in increased yields.

The Lapmaster line of Accupol Lapping & Polishing Wafer Thinning Jig Fixtures are designed to control precision thickness and parallelism of thin, fragile components made of semiconductor, compound semiconductor and electro-optics materials. A vacuum chuck retains the wafers during processing. Single or multiple wafers can be retained and processed within a fixture. An excellent planarizing tool for wafer processing in small quantity lots. Three (3) sizes are available, with the largest unit capable of processing a 6" (150mm) diameter wafer.

DEKKER Vacuum Technologies, Inc. offers the following:

Lubricated rotary vane vacuum pumps in capacities ranging from 2– 710 CFM (0.2 – 40 HP) are used in a variety of industries, such as vacuum packing, lifting, chucking, paper converting, electronics, printing, biotech, laboratories and hospitals. Pumps are single stage pumps with an integrated oil re-circulation system featuring:

• Heavy-duty construction
• Compact design, small footprint
• Simple to install
• Low maintenance
• Low noise level
• High tech vane material provides long vane life
• Gas ballast valve is standard
• Internally mounted check valve
• Float type oil-recovery valve ensures maximum air/oil separation
• High-efficiency multi-stage exhaust filter removes 99% of exhaust smoke
• Air-cooled design is standard
• Direct drive with flange-mounted motor

Lubricated rotary vane vacuum pumps for saturated air (wet) service in capacities from 19 – 70 CFM (1.25 – 4 HP) are specifically developed for applications with high inlet water vapor content, such as stone and glass cutting. Pumps are single stage pumps with an integrated oil re-circulation system featuring:

Oil-free (dry) rotary vane vacuum pumps in capacities from 2 – 100 CFM (0.25 – 7.5 HP) are air air-cooled, heavy-duty, non-lubricated pumps for vacuum applications in a variety of industries such as printing, woodworking, paper converting and vacuum chucking and lifting. Pumps feature:

Application engineers at Dekker Vacuum Technologies offer unmatched expertise, based upon years of experience in the vacuum industry and are available to answer any questions you may have. Please call us at 888-925-5444.

Aerotech's ABS series direct-drive, air-bearing spindles were designed to provide superior angular positioning and velocity control for applications including disk drive testing, imaging applications, and precision wafer inspection.

• Low-loss brushless servomotor
• Instrument-grade precision
• Balanced to ISO 1940 G 0.4
• Custom configurations available
• Ideally suited for data storage, wafer processing, diamond turning, and imaging
• Sub-arc-second resolution at high speed

Superior Mechanical Design The ABS2000 is balanced to ISO 1940 G 0.4 tolerances. The design also uses labyrinth-type sealing to minimize particle migration from the spindle, resulting in certification for Class 1 clean-room operation. An integral rotary union is provided for a vacuum supply.

Low Loss, Non-Influencing Direct-Drive Motor Aerotech's custom designed, low-loss motor produces >0.25 N-m (38 oz-in) of continuous torque with negligible motor losses, eliminating the need for cooling fins and/or external cooling. The non-influencing motor design minimizes parasitic forces in the motor, providing the exceptionally high level of error motion performance. These motors have all the advantages of a brushless direct-drive motor — no brushes to wear, and high acceleration and high speeds. With its low inherent inertia and high torque output, the ABS is capable of extremely high speeds and accelerations.

Accurate Positioning With a velocity ripple of <0.1%, an asynchronous error motion <20 nm, and total error motion <100 nm, the Aerotech spindle offers superior performance for high accuracy applications. The high performance motor and rotary encoder are directly coupled to a common shaft. When used with the Aerotech A3200 controller and Npaq® drive rack, the spindle resolution can be as high as 0.05 arc sec with no speed trade-offs. This makes the ABS2000 ideal for applications requiring both spindle operation and stage operation.

Flexible Configurations Options include mechanical or vacuum-chuck configurations, grounding ball, and optics mounting. Alternate higher torque motors are available. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated motion package.

To learn more about the ABS2000 series, please contact Steve McLane at Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, (Phone) 412-963-7470, (Fax) 412-963-7459, smclane@aerotech.com, www.aerotech.com.

The PN50i Applicator, configured as an 'i'-Series Applicator for integration into automated systems, is capable of extremely precise semi-automatic placement of die-cut adhesive backed components of up to 50 x 50mm in size.

i-Series Integrated Models

Nautilus Systems, Inc.'s integrated products are also known as their 'i'-Series. The 'i'-Series Applicators have been designed for use by in-house automation teams and custom equipment providers or integrators who desire a turn-key solution that can be easily integrated into an automated system. They have specially designed these systems to minimize the space that they occupy and to make them attractive for use by those wishing to integrate them.

Each 'i'-Series Applicator is delivered with a remote teach pendant that provides an interface to the Applicator so that it can be accessed from outside of a protected work environment. This teach pendant allows a technician to modify settings and review the status of the Applicator on demand. The 'i'-Series Applicators incorporate all of the Rapid Changeover features and modular design that are standard in their entire Applicator family.

Standard Features:

• Rapid Changeover including
• Magnetically Coupled Vacuum Chuck and other Component Specific Tooling
• Operator Interface Pendant
• Passive Payoff Assembly for 3" Core
• Motorized Take-Up Assembly (Re-wind)
• Virtually all items required for typical applications

The PN75i Applicator, configured as an 'i'-Series Applicator for integration into automated systems, is capable of extremely precise semi-automatic placement of die-cut adhesive backed components of up to 75 x 75mm in size.

i-Series Integrated Models

Nautilus Systems, Inc.'s integrated products are also known as their 'i'-Series. The 'i'-Series Applicators have been designed for use by in-house automation teams and custom equipment providers or integrators who desire a turn-key solution that can be easily integrated into an automated system. These systems are specially designed to minimize the space that they occupy and to make them attractive for use by those wishing to integrate them.

Each 'i'-Series Applicator is delivered with a remote teach pendant that provides an interface to the Applicator so that it can be accessed from outside of a protected work environment. This teach pendant allows a technician to modify settings and review the status of the Applicator on demand. The 'i'-Series Applicators incorporate all of the Rapid Changeover features and modular design that are standard in their entire Applicator family.

Standard Features:

• Rapid Changeover including
• Magnetically Coupled Vacuum Chuck and other Component Specific Tooling
• Operator Interface Pendant
• Passive Payoff Assembly for 3" Core
• Motorized Take-Up Assembly (Re-wind)
• Virtually all items required for typical applications