Equipment utilized to deposit thin films or modify the composition of a surface; e.g., through ion implantation or a nitriding or carburizing diffusion process.
MEMS Processing Equipment (39 suppliers)
Semiconductor Cluster Tools (65 suppliers)
Semiconductor cluster tools and equipment are used to process semiconductor wafers for the production of microelectronic components.
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Semiconductor Metrology Instruments (194 suppliers)
Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.
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Thin Film Equipment (317 suppliers)
Thin film equipment uses vacuum processing for the modification of surfaces using CVD, PVD, plasma etching, and thermal oxidation or ion implantation.
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Thin Film Monitors (56 suppliers)
Thin Film Sources (76 suppliers)
Thin film sources consist of magnetrons, evaporation thermal units, ion beams and other sources that produce deposition materials (vapors or ions) in a thin film system.
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