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Chapter 22.3.7 - Nanotechnology And Nanomanufacturing - Building Nanomanufacturing Standards

By Hwaiyu Geng
From Semiconductor Manufacturing Handbook

Nanomanufacturing needs the measurements and standards required to achieve effective and validated
nanoscale product and process performance. This challenge is mainly in the following three directions:

Atomic-scale manufacturing: Developing and assembling the technologies required to fabricate
standards that are atomically precise. This will include work directed at solving artifact integrity,
precision placement, dimensional metrology, and manufacturing issues.

Molecular-scale manipulation and assembly: Identifying and addressing the fundamental measurement,
control, and standard issues related to the manipulation and assembly of micro- or
nanoscale devices using optical, physical, and/or chemical methods. This entails building the
manipulation technology and using it to understand and address the measurement issues that arise
when assembling devices at the micro- or nanoscale level.

Micro-to-millimeter scale manufacturing technologies: Developing the technologies required to
position, manipulate, assemble, and manufacture across nm-to-mm multilength scales.

© 2009 McGraw-Hill Companies, Inc. (The)

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