As the MEMS Revolution Takes Off, Small Is Getting Bigger Every Day Gnat-sized robots, microscopic gyroscopes, television beamed directly onto your retina. This may sound like a grocery list for a crazed sci-fi visionary. But all these projects are in the works today, thanks to an emerging chip technology known as microelectromechanical systems. While magical microbots may still be a few years away, MEMS are already a multibillion-dollar business in the car, printer, and display-projection industries. Traditional chips are flat, static structures. MEMS, by contrast, are silicon wafers packed with kinetic, three-dimensional gizmos: laboratories, laser-guided mirrors, canals flowing with chemicals. An offshoot of the semiconductor industry, MEMS benefit from the well-known peculiarities of the silicon universe - every year chips get tinier, cheaper, and faster. If proponents are correct, MEMS will soon be ubiquitous. There will be the far out (airborne micro flying machines, networked minibots) and the practical (disposable blood-pressure gauges, wearable pollution sensors). Within 20 years, there will be no avoiding MEMS: They will be in every telecom line, computer, and coffeemaker - even in our own bodies. As these sensors and actuators - devices that react to their environment - permeate the world, the fabric of daily existence will come alive. Like the transistor and
Products & Services
MEMS devices integrate mechanical components, electronics, sensors and actuators on a semiconductor material, chip, or wafer.
MEMS Processing Equipment
MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers.
MEMS foundry services suppliers design and manufacture microelectromechanical devices on a contract basis, in prototype to production quantities.
Semiconductor Foundry Services
Semiconductor foundry services suppliers design and manufacture semiconductor chips on a contract basis, in prototype to production quantities.
IC Interconnect Components
IC interconnect components interface or connect a microelectronic semiconductor chip to a board or larger scale device.
Topics of Interest
MEMS motion sensors have prompted
major revolution in the automotive,
IT, and consumer markets. Indeed,
MEMS accelerometers are used on a
daily basis in our cars, computers, and
Dr. Rajeshuni Ramesham Jet Propulsion Laboratory/ California Institute of Technology
Dr. Reza Ghaffarian Jet Propulsion Laboratory/ California Institute of Technology
Prof. Farrokh Ayazi Georgia...
9.1.7 MEMS Technology
Microelectromechanical systems (MEMS) evolved from silicon semiconductor manufacturing in the late 1970s as an inexpensive mass manufacturing technology for sensors at...
It is certainly obvious for everybody that MEMS motion sensors are
the source of a major revolution in the automotive, consumer, IT and
industrial market. We all use on a daily basis MEMS...
Chapter written by A. TIPEK, P. RIPKA and E. HULICIUS, with contributions from A. HOSPODKOV and P. NEU IL.
11.1. Introduction: MEMS
MEMS is an abbreviation for "micro electro-mechanical system"...