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Femtosecond Verses Nanosecond Laser Machining: Comparison of Induced Stress and Structural Changes in Silicon

From Mound Laser & Photonics Center, Inc.
 

 

Laser micromachining has proven to be a very successful tool for precision machining and microfabrication with applications in microelectronics, EMS, medical device, aerospace, biomedical, and defense applications. Femtosecond (FS) laser micromachining is usually thought to be of minimal heat-affected zone (HAZ) local to the micromachined feature. The assumption of reduced HAZ is attributed to the absence of direct coupling of the laser energy into the thermal modes of the material during irradiation. However, a substantial HAZ is thought to exist when machining with lasers having pulse durations in the nanosecond (NS) regime. In this paper, we compare the results of micromachining a single crystal silicon wafer using a 150-femtosecond and a 30-nanosecond lasers.

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