MICRO:Top 30 (November/December 2001)

The fully automated Expida dual-beam structural diagnostics tool performs in-fab characterization and analysis of process excursions and defects. The instrument can be reconfigured from 200- to 300-mm wafer manufacturing with minimal interruption. The tool allows users to cut, view, measure, analyze, and modify the structures of ICs during all aspects of manufacturing. Parofluor high-performance perfluorinated elastomers for use in semiconductor fabs provide long seal life in harsh environments and are manufactured in an ultra-high-purity production area to minimize contamination. Ultra-series materials include compounds offering distinctive physical properties and different performance capabilities. Resistant to steam, water, and a wide variety of chemicals, the materials can be formed into O-rings, molded shapes, slit-valve door seals, and other configurations. They retain their sealing ability after continuous exposure to temperatures 320°C in one formulation. A choice of black, white, and translucent materials is offered. The Sysmex FPIA-2100 is a fully automated particle size and shape analyzer that delivers size and shape distribution data and, using a CCD camera, produces images of each particle as well as a scattergram of shape index versus particle size. Samples pass through a sheath flow cell, which transforms the particle suspension into a narrow or flat flow, ensuring the largest area is oriented toward the camera and that all particles are in focus. A CCD microscope illuminated by strobe captures particle images every second. The system can measure particles from 0.7 to 160 µm in size. The numerical evaluation of shape is derived from measuring the area of the particle. The MC3 medium-current ion implantation system for 300-mm semiconductor manufacturing is designed to meet both existing and future manufacturing requirements. The fully automated serial processing implanter has evolved from the existing 8250 200-mm technology platform. The implanter's angular energy filter maintains a high level of beam purity over the range