MICRO: Tech Viewpoint

Advanced process control (APC) has had a major impact on the semiconductor manufacturing industry since the term was first coined by Sematech more than a decade ago. It is the unifying theme for a community of practitioners who congregate by the hundreds at three annual conferences around the globe. And it has spawned a dedicated group of suppliers that serve the APC market segment with a wide range of products and services, from sensors to fabwide control and optimization systems. Now a mainstream production technology, APC is considered essential for the 300-mm, 130-nm technology node and beyond. As a result, it has attracted much attention and investment funds over the years. However, like many other competitive segments in the cyclical IC industry, APC is not an easy business to be in. Continued progress at the rate we have come to expect will depend on improving our effectiveness in that area. The need for improvement was the main motivation behind a recent series of discussions with APC veterans involved in both the business and technology arenas. Engaged in activities from fundamental R&D to standards development, their host organizations include equipment and components suppliers, software product and services vendors, and IC manufacturers at the head of the food chain. A summary of the collective challenges facing APC, the opportunities for addressing them, and the changes that may take place in the coming decade are the subjects of this article. Emerging from the deepest industry downturn in 20 years, the APC community must address several important questions that will shape the APC software market segment for much of the coming decade: • In what direction is the commercial semiconductor APC software market heading—will it grow, remain flat, or decline? How does the industry value software? What business models have or have not worked in selling