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MICRO: Rudolph, SCP

Rudolph, SCP Global grab first-to-market honors with new product launches Two semiconductor equipment suppliers staked out first-to-market bragging rights with springtime launches of new products. Rudolph Technologies came out with its WaferView Team concept, which combines hardware and software for what the company says is the first 100% real-time macrodefect inspection solution for every wafer at each critical lithography or CMP step. SCP Global released the Emersion tool, touted as the first single-wafer immersion cleaning system, targeted specifically for sub-90-nm critical cleans and etches. HONORS: The WaferView 320 system is part of Rudolph's macrodefect inspection suite for critical litho and CMP steps. PHOTO COURTESY OF RUDOLPH TECHNOLOGIES Rudolph's product has three constituent parts: the I-MOD inspection modules, which are designed to be integrated with track or polishing tools; the WaferView 320 stand-alone inspection and review systems; and the YieldView server, which coordinates the product suite. Together, the company says the
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Products & Services
Chemical Mechanical Planarization (CMP) Slurries

Chemical mechanical planarization (CMP) slurries consist of surface active chemicals and microabrasive  grains in a liquid dispersion.

Semiconductor Metrology Instruments
Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.  
Inspection Services
Inspection services examine products, parts, equipment, repairs, services, installations, and facilities to ensure quality, consistency, and condition, as well as conformance to required standards and/or procedures.
Semiconductor Foundry Services
Semiconductor foundry services suppliers design and manufacture semiconductor chips on a contract basis, in prototype to production quantities.
Semiconductor Wet Process Equipment
Semiconductor wet process equipment performs a variety of wet processing applications including etching, washing, chemical mechanical polishing (CMP), and spin coating in semiconductor or microelectronics manufacturing.
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