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MICRO:Industry News:Order Desk (April '99)

Many Lam etch tools sold Several chipmakers from around the world have placed orders for the TCP 9600PTX metal etch system from Lam Research, the supplier announced. Orders for the high-density tool have come from foundries in Taiwan and Singapore, DRAM manufacturers in South Korea and Japan, and logic device manufacturers in Europe and the United States. The system processes 45 wafers per hour and has a low consumables rate, Lam says. Hyundai Semiconductor America will install
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