The WaferSense autoleveling sensor is a wireless waferlike device that enables quick and accurate leveling of IC wafer processing and automation equipment. Designed to be handled like a 150-, 200-, or 300-mm wafer, the thin and lightweight sensor can be placed in cassettes or front-opening unified pods, on end effectors or aligners, in loadlocks, and in process chambers to ensure that stations are level and coplanar. The device provides precise pitch-and-roll measurements—accurate to ±0.03°—that can be logged to relate coplanarity with yield and determine optimal tool adjustments. The Atlas advanced metrology system combines multiple metrology technologies in one stand-alone unit. Providing a reduced cost of ownership and high utilization rates, the tool can house up to five critical metrology technologies at one time and performs metrology for wafer characterization with excellent repeatability. It performs 200- and 300-mm wafer metrology applications and can be configured with any combination of spectroscopic reflectometer, spectroscopic ellipsometer, optical critical dimension, diffraction-based overlay, and wafer stress/bow modules. The tool features temperature control and robotics, including a dual-arm robot, a high-precision stage, and high-speed focus system. It provides robust pattern recognition, fine thickness reproducibility, and high throughput. The Liquozon Single ozonated-water (DIO water) delivery system is the newest in a series of ultrapure ozonated water generators. Designed to supply DIO water to single-wafer cleaning tools, the compact and self-contained unit provides ultrapure DIO with a high and accurate ozone concentration at a constant delivery pressure. The unit delivers DIO water with ozone concentrations between 5 and 55 ppm at flow rates between 0.5 and 20 L/min and at a pressure of up to 2.5 bar. The instrument, which measures 40 X 50 X 120 cm, contains an ozone-gas generator, an ozone contactor, a dissolved-ozone analyzer, and an ozone-gas destruct unit. Tantalum sputtering targets are available for all leading
Products & Services
Semiconductor Metrology Instruments
Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.
Ultrapure Water Equipment
Ultrapure water equipment is used to provide high-purity deionized water (DI water) to the semiconductor and pharmaceutical industries.
Lithography equipment transfers circuit or device patterns onto a substrate using a patterned mask and a beam of light or electrons to selectively expose a photoresist layer. Overlay metrology systems align the pattern masks or reticules.
Air cleaners re-circulate, filter and purify air for process and environmental applications.
Pulsation dampeners are devices that control the pulsations that result from a pressurized system's stroking action. They are often referred to as accumulators or surge suppressors.
Topics of Interest
The Atlas advanced metrology system combines multiple metrology technologies in one stand-alone unit. Providing a reduced cost of ownership and high utilization rates, the tool can house up to five...
Jae-Inh Song, Richard Novak, Ismail Kashkoush, and Pieter Boelen, An environmentally friendly alternative to sulfuric acidbased cleaning chemistries, DIO processing can lower operating costs...
The WaferSight wafer-flatness tool performs high-resolution and high-throughput mapping of wafer shape, flatness, and thickness variations. Based on proprietary optical laser interferometry, the...
Three new ion implanters are available in the single-wafer VIISta platform. All three tools—the high-current 80HP, the medium-current 810EHP, and the high-energy 3000HP—have a throughput...
The WaferMark FOUP system for marking 300-mm wafers uses laser technology to place permanent, highly readable marks on wafers to allow wafer traceability. The tool features an ultrastable diode-pumped...