MICRO:Archive:Back Issue TOC

Metrology sector seeks methods to measure up to new challenges Only a wee bit Moore? Opening start-up's first plant, outsourcing veteran sees vindication and consolidation Applied claims 21-tool launch; Selete approves FSI tool IMEC, Sematech enter R&D gate project; workshop agrees on soft pellicles Siemens, Intel, Macronix to build Thai fab; Mitsubishi, Honeywell form wet-process chemical alliance; Komatsu, Ushio launch excimer laser business Motorola opens Romanian center; Lytron hires AMS Thermotech as UK distributor BOC Edwards, Pelchem to build plant in South Africa DRAM production, 300-mm fab growth to spur tool sales SemiSales.com debuts at Semicon West Advanced Energy buys EMCO; ATMI purchases ESCA; BOC, ISinc form strategic design tool alliance; MKS acquires Spectra International; Sitek becomes Prod�o Ultrapure Water Asia, Semicon Southwest, and more NIST wafer improves RTP; ASTM issues new wiper standard; SEMI hosts FPD show with EIAJ and JEIDA; ANSI okays IEST to write standards; MRS issues call for papers CMP system, dry pumps, inspection systems, lithography platform, birefringence measurement, SIMS tool, feedthrough actuator, XRF elemental analyzer, CMP slurry cleaning systems, particle detection system, silicon-on-quartz wafers, yield management software, linear motion guide, flame detector, brushless linear motors, Teflon bellows, rapid thermal processing tool, poly etch system, critical dimension SEMs, flow switches, web-enabled tool connectivity, metrology tool, plasma etch tool Meeting continues industry drive to chip in on economic model Increased response rate expected as SEMI introduces electronic standards balloting Infineon, Intel announce 300-mm expansion plans SEZ opens Singapore office; AMD, Fujitsu to build flash memory plant Infineon joins EUV effort; Micronas to extend fab Sematech, Selete publish on-line info; Soitec to make SOI wafers Timbre,